Investigation of the Lower Temperature Sio2 Surface Passivation Technology on Inas/Gasb Superlattice Detectors

Ruiqin Peng,Shujie Jiao,Hongtao Li,Liancheng Zhao
DOI: https://doi.org/10.2991/icamcs-16.2016.80
2016-01-01
Abstract:We report on the investigation of effective SiO2 passivated layer deposited at low temperatures. Comparison with the unpassivated photodiodes, at 77 K, the dark current density is reduced by one order of magnitude is achieved by introducing SiO2-passivated layer deposition technology at a lower temperature of 75 degrees C. The temperature-dependence and bias-dependence of the dark current are studied experimentally and correlated to the theory, and then the contribution of each dark current mechanism is also identified.
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