Impact Of Sinx Passivation On The Surface Properties Of Ingaas Photo-Detectors

ying zhou,xiaoli ji,ming shi,hengjing tang,xiumei shao,xue li,haimei gong,xun cao,feng yan
DOI: https://doi.org/10.1063/1.4926736
IF: 2.877
2015-01-01
Journal of Applied Physics
Abstract:We investigate surface passivation effects of SiNx films deposited by inductive coupled plasma chemical vapor deposition (ICPCVD) and plasma enhanced chemical vapor deposition (PECVD) technologies for InAlAs/InGaAs/InP photo-detectors. It is found that ICPCVD deposited SiNx film effectively reduces the densities of the interface states and slow traps near SiNx/InAlAs interface, which realize the small surface recombination velocity and low surface current for InAlAs/InGaAs/InP photo-detectors. By comparing C-V and XPS results, it is suggested that the trap density reduction by ICPCVD technology could be attributed to the disorder suppression on InAlAs surface due to the high density of SiNx film and less processing energy to the InAlAs surface. (C) 2015 AIP Publishing LLC.
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