Photoelectron In-situ Sensing Device with Embedded Photodiode and Interface Passivation

Yaoru Qu,Jian Liu,Yong Xu,Yulong Jiang,Jing Wan
DOI: https://doi.org/10.1109/asicon58565.2023.10396288
2023-01-01
Abstract:The optimized structure of the Photoelectron in-situ sensing device (PISD) is designed, and its performance is studied through TCAD simulation. The results indicate that the use of embedded photodiode with interface passivation effectively suppresses the adverse effects of interface traps, leading to improved device performance. A comparison is made between two possible passivation approaches for the backside of the device. Additionally, the relationship between the device sensitivity and the incident wavelength, as well as the device thickness, is investigated, and it is explained from the perspective of the device's sensing principles.
What problem does this paper attempt to address?