Zro2 and Ysz Thin-Films Synthesized by Microwave Plasma Cvd Process

WJ YU,YH ZHANG,DK PENG,GY MENG,CB CAO
1993-01-01
Acta Chimica Sinica
Abstract:Zirconia and yttria-stabilized zirconia (YSZ) thin films mere successfully synthesized on a variety of substrates by microwave plasma CVD process, Using beta-diketone chelates as volatile sources. The ZrO2 films we got contain monoclinic and tetragonal phases. In YSZ films, when Y2O3 content was less than 7 mole percent, two-phases were observed, namely cubic and monoclinic zirconia. When the content bigger than 7 mole percent, the film only has a cubic phase. TEM observation and XRD analysis, the ZrO2 and YSZ films consist of nanoscale crystallites, which size is about 10nm. XPS analysis revealed that the Zr3d(5/2) and Zr3d(3/2) binding energies were lower than the standard values.
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