A Cascade Electron Source Based on Series Horizontal Tunneling Junctions

Zhiwei Li,Xianlong Wei
DOI: https://doi.org/10.1109/TED.2020.3044868
IF: 3.1
2021-01-01
IEEE Transactions on Electron Devices
Abstract:On-chip tunneling electron sources have wide potential applications in miniature vacuum electronic devices, and emission efficiency is one of their performance benchmarks. Acascade electronsource (CES) based on series metal-insulator-metal horizontal tunneling junctions (HTJs) is proposed, where free electrons are additively extracted from each tunneling junction. A CES with n HTJs shows a theoretical emission efficiency of approximately eta(n) = 1-(1-eta(0))(n), with eta(0) being the efficiencyof a single tunneling junction. Experimentally, aCESwith three Si-SiOx-Si tunneling junctions is demonstrated, achieving an emission efficiency of as high as 47.6%. This work provides a new way of realizing highly efficient on-chip tunneling electron sources.
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