InP-Based Grating Antennas for High-Resolution Optical Beam Steering

Yi Wang,Jorn P. van Engelen,Sander F. G. Reniers,Manuel B. J. van Rijn,Xuebing Zhang,Zizheng Cao,Victor Dolores-Calzadilla,Kevin A. Williams,Meint K. Smit,Yuqing Jiao
DOI: https://doi.org/10.1109/jstqe.2019.2958999
IF: 4.9
2021-01-01
IEEE Journal of Selected Topics in Quantum Electronics
Abstract:Optical beam steerers on InP integrated photonics have not been able to offer high angular resolution, due to the technological challenges in realizing a large emission aperture. In this paper, we propose the creation of waveguide-based grating antennas fabricated in SiO2 super-cladding on InP membrane on silicon (IMOS) to achieve simultaneously high resolution and good compatibility with InP-based active devices. By exploiting the high dry etch selectivity between SiO2 and InP, a tolerant fabrication process is proposed and demonstrated, allowing for high controllability in the process. Device parameters including buffer thickness and pitch have been explored to obtain an optimized design. A 2-mm long grating antenna is fabricated and shows a record narrow full-width-half-maximum angular beam width of 0.05 degrees and a high spatial resolution of more than 250 points when the wavelength is tuned over a range of 100 nm.
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