High-performance Millimeter-Scale Silicon Grating Emitters for Beam Steering Applications

Ze Chen,Haibin Lu,Yanfeng Chen,Xiaoping Liu
DOI: https://doi.org/10.3788/col202220.121301
IF: 2.56
2022-01-01
Chinese Optics Letters
Abstract:A 2-mm-long silicon-on-insulator grating emitter with a narrow angular full width at half-maximum[FWHM]and a high sideband suppression ratio[SSR]is proposed and designed.It consists of a Si3N4/Si grating with an approximate Gaussian emission profile along the grating length,which aims to reduce the sidelobe intensity of the scanning light in the far-field,thereby improving the resolution of the longitudinal steering resolution of the light detection and ranging[lidar].Numerical analysis shows that the angular FWHM of the emitted beam could be as low as 0.026° for a grating length of 2.247 mm and the input TE-like waveguide mode at 1550 nm,and the SSR could be more than 32.622 dB.Moreover,this Si3N4/Si grating exhibits a favorable fabrication error tolerance when considering the width and length variation of the Si3N4 overlayer in practice.Our design offers a promising platform for realizing integrated optical phased arrays for the long-distance solid-state lidar.
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