Design of high concentration oxygen sensor based on MEMS chip

Jiangrong Qian,Lei Xu,K. Shi,Cong-Cheng Chen,Hongjun Wang,G. Hu
2015-01-01
Abstract:There are increasingly urgent needs for low power, high performance, and low cost oxygen sensor in oxygen concentrator industry. A new type of MEMS oxygen sensor based on MEMS thin film resistor and heat transduction is designed. Using clean room technology processing micron-size chip, help reduce post-production costs. Preliminary experiment results demonstrate that the output voltage signal is proportional to the oxygen concentration in normal working range, and the detection accuracy can reach less than 1%.
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