Design of Si-based Vertical Cavity Surface Light Emitter

姚永昭,岳瑞峰,刘理天
DOI: https://doi.org/10.3321/j.issn:0254-3087.2004.z1.121
2004-01-01
Abstract:A Si-based vertical cavity surface light emitter was developed that is compatible with existing IC processes. The device's distributed Bragg reflectors (DBR) are composed of periodically stacked plasma enhanced chemical vapor deposition a-SiO2:H/a-Si:H layers with the active layer filled with a-SiCx:H. The number and order of the periodically stacked multilayers was determined through simulations. A photoluminescent red light emitter and an electroluminescent blue-green light emitter were fabricated. The photoluminescent and electroluminescent spectra resulted from the a-SiCx:H luminescence and Bragg reflector's effect on the spectra.
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