Room Temperature Luminescent Properties of Si-Based Fabry-Perot Microcavity

王燕,但亚平,岳瑞峰,刘理天
DOI: https://doi.org/10.3321/j.issn:0253-4177.2003.01.014
2003-01-01
Abstract:A new kind of Fabry-Perot microcavity structure is presented in which the Si/SiOxNy distributed Bragg reflectors (DBR) with a-Si1-xCx acting as spontaneous emission layer are fabricated by plasma enhanced chemical vapor deposition (PECVD). The modified photon density of state of Fabry-Perot microcavity in one dimension will result in the enhancement of the spontaneous emission at the photon energies corresponding to the microcavity resonance. Besides, the linewidth of the spontaneous emission will be reduced greatly at the microcavity resonance. By adjusting the thickness and refractive index of the spontaneous emission layer and the DBR sublayer, the luminescence peak position can be controlled precisely. By means of simulation and experiment, this device makes silicon-based materials possible candidate for the room temperature visible light emission media.
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