A Planar Single-Actuator Bi-Stable Mechanical Latch As an Electrical Switch

Yang Bu,Yue Jiang,Saeko Kawano,Brian S. T. Tam,Sheng Ni,Liying Lin,Osamu Tabata,Toshiyuki Tsuchiya,Xiaohong Wang,Man Wong
DOI: https://doi.org/10.1109/mems46641.2020.9056413
2020-01-01
Abstract:A micro-fabricated planar bi-stable mechanical latch is demonstrated and presently reported. The compact size of the bi-stable mechanism is achieved by enclosing an anchored latch groove in the center of other movable structures. Driven using a single actuator, the device can be switched mechanically between two stable states by applying respective setting and resetting voltage of 10.3 V and 9.5 V. Exhibiting good durability and promising potential for applications demanding micro-switches, the device was demonstrated as an electrical switch to control a light-emitting diode.
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