A new latched 2×2 optical switch using bi-directional movable electrothermal H-beam actuators

Wen-Chih Chen,Chengkuo Lee,Chia-Yu Wu,Weileun Fang

DOI: https://doi.org/10.1016/j.sna.2005.04.033

2005-01-01

Abstract:Combining a new H-beam actuator, movement link structure, reflective micro-mirror, and arched buckle spring to demonstrate a new compact latched 2×2 optical switch device is first reported. This novel H-beam actuator can generate bi-directional static displacement and bi-directional motion. Optical switch using this H-beam actuator is well functioned and exhibits good optical characteristics with industrial level performance. The measured optical switching characteristics include switching time of 5ms under a 25V dc pulse, back reflection loss of −52dB, cross-talk of −60dB, insertion loss of 0.8dB, polarization-dependent loss of 0.03dB, and wavelength-dependent loss of 0.11dB.