Broadband, Wide-Angle Antireflection in GaAs Through Surface Nano-Structuring for Solar Cell Applications

Saraswati Behera,Paul W. Fry,Henry Francis,Chao-Yuan Jin,Mark Hopkinson
DOI: https://doi.org/10.1038/s41598-020-63327-7
IF: 4.6
2020-01-01
Scientific Reports
Abstract:We demonstrate broadband and wide-angle antireflective surface nanostructuring in GaAs semiconductors using variable dose electron-beam lithography (EBL). Various designed structures are written with EBL on a positive EB-resist coated GaAs and developed followed by shallow inductively coupled plasma etching. An optimized nanostructured surface shows a reduced surface reflectivity down to less than 2.5% in the visible range of 450–700 nm and an average reflectance of less than 4% over a broad near-infrared wavelength range from 900–1400 nm. The results are obtained over a wide incidence angle of 33.3°. This study shows the potential for anti-reflective structures using a simpler reverse EBL process which can provide optical absorption or extraction efficiency enhancement in semiconductors relevant to improved performance in solar photovoltaics or light-emitting diodes.
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