Optimization of Anti-Reflective GaAs Nano-Rods on Solar Cells

nan liu,yu hu,jianjun he
DOI: https://doi.org/10.1364/ACPC.2014.ATh1J.5
2014-01-01
Abstract:A method of fabricating nano-rods on GaAs wafer using colloidal lithography and ICP dry etching is presented. The effect of diameter on anti-reflection performance is simulated, and experimentally investigated. A low reflectivity of 11.1% is measured.
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