A new analytical model of single-stage microleverage mechanism in resonant accelerometer

DingHong,ZhaoJiuxuan,JuBing-Feng,XieJin

2016-01-01

Abstract:Microleverage mechanism which is widely applied in microelectromechanical systems (MEMS) transfers and amplifies force or displacement from input to output. In this work, one-stage microleverage me...

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A New Analytical Model of Single-Stage Microleverage Mechanism in Resonant Accelerometer

Hong Ding,Jiuxuan Zhao,Bing-Feng Ju,Jin Xie

DOI: https://doi.org/10.1007/s00542-015-2528-1

2015-01-01

Microsystem Technologies

Abstract:Microleverage mechanism which is widely applied in microelectromechanical systems (MEMS) transfers and amplifies force or displacement from input to output. In this work, one-stage microleverage mechanism is integrated into a biaxial micro resonant accelerometer to improve sensitivity. Force amplification factor of the microleverage is analyzed and deduced by integral method. The results from theoretical model match well with the ones from finite element method (FEM) simulation, which proves that the proposed model is relatively accurate and the width of lever beam is a quite important parameter in design. The resonant accelerometer is successfully fabricated by MEMS technology. Preliminary experiments are conducted and demonstrate differential sensitivity of 71 Hz/g for the accelerometer with resonant frequency of 267.726 kHz.
Calculation and Improvement on Amplification Effect of MEMS Leverage Mechanism

HU Hao,DONG Jing-xin,LIU Yun-feng,CAO Yu

DOI: https://doi.org/10.13695/j.cnki.12-1222/o3.2011.01.013

2011-01-01

Abstract:Resonant MEMS accelerometer has high stability and strong anti-interference ability,and the change of resonant beam stiffness with axial inertial force can be used to detect the acceleration magnitude.In order to get a high scale factor,MEMS leverage mechanism is usually used to amplify the inertial force.But the amplification effect can't meet the theoretical value in the experiments,especially for multi-leverage mechanism.To solve this problem,the leverage mechanism model is reasonably simplified,and finite element analysis method is used to calculate the amplification effect.The stiffness of mechanical levers,support beams of proof mass and resonant beams are obtained separately.The theoretical analysis and simulation ANSYS are made,and the results demonstrate the validity of this method.At last,the method to obtain high amplification by increasing the output stiffness is given based on the proposed method,and the amplification of a MEMS leverage mechanism can be improved from 3.9 to 7.0.
Design Of A High-Sensitivity Micromechanical Resonant Accelerometer With A Two-Stage Microlever

Wen Yue,Li Cheng,Fan Shangchun,Kan Baoxi,Wang Chao

DOI: https://doi.org/10.1109/IAEAC.2015.7428718

2015-01-01

Abstract:A novel micromechanical silicon resonant accelerometer with a two-stage microlever mechanism and dual-proofmass architecture was presented to achieve a higher sensitivity and stability. According to the mechanical model of the two-stage microlever, the ANSYS simulations were performed to analyze the effects of structural parameters, including lever structure dimensions and the ratio of lever power arm to lever resisting arm, on the scale factor and the operating modal frequency of accelerometer. Furthermore, the dual-proofmass architecture effectively removed the "blind zone" resulted from a "lock-in" phenomenon at the crossing frequency. In consideration of the tradeoff of the acceleration sensitivity and the operating modal frequency of 1.2 kHz, the designed accelerometer achieved a sensitivity of 430 Hz/g and a linear accuracy of 5 parts per thousand with a nominal resonant frequency of 22482 Hz in the range of +/-30 g.
Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Peiji Sun,Xuan She,Junjie Yao,Kan Chen,Ran Bi,Lei Wang,Xiaowu Shu

DOI: https://doi.org/10.1109/jlt.2022.3163737

IF: 4.7

2022-01-01

Journal of Lightwave Technology

Abstract:In this paper, we design a monolithic integrated micro-opto-electromechanical system(MOEMS) accelerometer based on the Michelson interferometer structure. The accelerometer realizes the on-chip integration of the mode spot converter, the sensing optical path, the phase modulator and the photonic crystal reflector, and it senses the external acceleration through a “three-beam” structure which is composed of a central support beam and two tiny beams. The push-pull structure eliminates the coupling crosstalk caused by paraxial acceleration. Accurate results are demonstrated as follows: an accelerometer mechanical sensitivity of 3.638 nm/g, with a resonance frequency of 1742.2 Hz and a linear measurement range of ± 500 g, corresponding to a foot print of the core part with 960 μm×600 μm. With its high precision, large measurement range, and small size, the proposed accelerometer may pave the way for the applications in civil, industrial and military fields.
A New Type of MEMS Accelerometer with Up-Tuning Structure

Yixuan Guo,Zhonghe Jin,Jiehui Du,Yidong Liu

DOI: https://doi.org/10.1109/3m-nano.2016.7824923

2016-01-01

Abstract:In this paper, design, implementation and characterization of a new type of Micro-electromechanical system (MEMS) accelerometer with up-tuning structure is presented. Under some circumstances, the spring of the beam is very fragile and can be easily broken which is unrepairable due to a relatively large acceleration. Up-tuning effect can greatly solve the problem and harden the spring of the beam. Firstly, the theoretical design and working principle of tuning structure are presented. Then, fabrication process and parameters is illustrated. Finally, experiments are conducted. The resonant frequency can be tuned from 386Hz to 407Hz when the tuning voltage changes from 0V to 12V. The equivalent spring constant can be tuned from 65N/m to 72N/m. The linearity of the new type of MEMS accelerometer with up-tuning structure can reach 99.9865%.
A Mems Piezoelectric In-Plane Resonant Accelerometer With Two-Stage Micro-Leverage Mechanism

Yixiang Wang,Hong Ding,Xianhao Le,Jin Xie

DOI: https://doi.org/10.1109/NEMS.2016.7758289

2016-01-01

Abstract:In this paper, we firstly present a MEMS (micro-electromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity of the resonant accelerometer. The preliminary characterization of the device was tested in a vacuum chamber at the pressure of 4 mTorr. The sensitivity of the device is 28.4Hz/g at the base frequency around 141 kHz (201 ppm/g), which is higher than the previously reported data.
A Highly Sensitive Biaxial Resonant Accelerometer with Two-Stage Microleverage Mechanisms

Hong Ding,Jiuxuan Zhao,Bingfeng Ju,Jin Xie

DOI: https://doi.org/10.1088/0960-1317/26/1/015011

2015-01-01

Journal of Micromechanics and Microengineering

Abstract:This paper presents a design and experimental evaluation of a micro-electro-mechanical system biaxial resonant accelerometer with two-stage microleverage mechanisms. The device incorporates two pairs of double-ended tuning fork resonators coupled to a single proof mass. The two-stage microleverage mechanisms possess a higher amplification factor than single-stage microleverage mechanisms, so that the proposed accelerometer has a high level of sensitivity. In addition, a low level of cross-axis sensitivity is realized because of the decoupling beams. The accelerometer is theoretically analyzed and then simulated in the system level by the finite element method. The device is fabricated in a silicon-on-insulator wafer. The experimental results demonstrate that the average differential sensitivity of the resonant accelerometer is 275 Hz g(-1) at a resonant frequency of 290 kHz under a polarization voltage of 5 V. The measured cross-axis sensitivity is lower than 3.4%.
Pull-In Dynamics of Two MEMS Parallel-Plate Structures for Acceleration Measurement

Zhipeng Ma,Xiaojun Jin,Yixuan Guo,Tengfei Zhang,Yiming Jin,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1109/JSEN.2021.3083784

IF: 4.3

2021-01-01

IEEE Sensors Journal

Abstract:This paper investigates the pull-in dynamics of single-sided and double-sided parallel-plate (SSPP and DSPP) structures employed in MEMS devices for acceleration measurement. A lumped electromechanical model considering a variable damping coefficient and external acceleration is developed for studying their pull-in dynamical behavior. The critical pull-in displacement and pull-in voltage for both parallel-plate structures operated with external acceleration are derived based on the static and dynamical analysis of the proposed model, which are in good agreement with the experimental results. The derived closed-form solutions are shown to be capable of predicting the pull-in behavior of both parallel-plate structures in an overdamped system. Two MEMS parallel-plate structures exhibit distinct pull-in characteristics due to their distinct configurations. The commonly used SSPP structure for MEMS devices is shown to have a relatively linear response to the external acceleration in terms of the critical pull-in displacement and pull-in voltage. However, the DSPP structure exhibits much larger yet nonlinear sensitivity of both the critical pull-in displacement and the critical pull-in voltage to a small range of external acceleration, which has the potential of developing high-sensitivity accelerometers whenever the sensitivity nonlinearity is compensated. Moreover, the effects of pressure are characterized for both DSPP and SSPP devices, which affects the difference between the critical static and dynamic pull-in voltages. The SSPP structure is shown to have the critical pull-in voltage proportional to the logarithmic magnitude of the pressure, while that of the DSPP structure do not vary linearly with respect to the logarithmic magnitude of the pressure.
A Novel Biaxial Resonant Micro Accelerometer with Microleverage Mechanism

Hong Ding,Jiuxuan Zhao,Jin Xie

DOI: https://doi.org/10.1109/nems.2015.7147355

2015-01-01

Abstract:In this research, a novel biaxial resonant micro accelerometer with a single proof mass is presented, which realizes decoupling effect between two orthogonal axes by decoupling beam and increases sensitivity by microleverage mechanism. This device was fabricated in commercial process of SOIMUMPs. The device was fixed on a rotating structure and put in a vacuum chamber for testing. The experimental results demonstrate a low level of cross-axis sensitivity and a differential sensitivity of 71.25 Hz/g around a resonant frequency of about 267.7 kHz under 37.5 mTorr vacuum pressure.
Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Wang Wen,Zhu Zhu,Chen Zichen

DOI: https://doi.org/10.1117/12.885293

2010-01-01

Abstract:This paper presents a novel piezodriven X-Y stage utilizing flexure hinges. Levers of high amplifying rate were adopted to magnify the output displacement of the piezoelectric actuator and a complex parallel four-bar mechanism was used to guide the mobile platform. In order to describe the static and dynamic behaviour of the stage, an analytical model was built and a series of formulae were deduced. Based on mathematical analysis, the configuration of the stage was optimized. Then Finite Element Analysis was applied to analyze travel ranges, natural frequencies and stress distribution. The simulation computation results demonstrate that the stage could reach a motion range of 200 mu m by 200 mu m and has a first order natural frequency of 265 Hertz, which is of good concordance with the theoretical estimate. Now a prototype is being fabricated.
Critical Technologies in Design of Micromechanical Resonant Accelerometer

REN Jie,FAN Shang-chun,WANG Lu-da

DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.04.015

2008-01-01

Abstract:Micromechanical resonant accelerometer has the advantages of direct frequency output,high stability,and high precision.This paper studies the mechanics of micromechanical resonant accelerometer,and creates the mathematical model of the first-level sensing structure,lever structure and the second-level sensing structure.We also explain that the key technique of the measurement of the high sensitivity accelerometer is the design of the bearing beam,the proof mass,the resonator and the leverage mechanisms,and propose a structure of micromechanical resonant accelerometer.At last,the optimum design and the result of the emulation of the structure are achieved,and the performance indexes are:the resonant frequency is 98 858 Hz,the Q value is 673.9,and the sensitivity is 24.52 Hz/gn.
Design, Analysis, and System-Level Simulation of A Micromachined Resonant Charge Sensor with Microleverage Mechanisms

Jiuxuan Zhao,Hong Ding,Wen Wang,Jin Xie

DOI: https://doi.org/10.18494/sam.2015.1193

IF: 1.2

2015-01-01

Sensors and Materials

Abstract:In this paper, a micromechanical electrostatic resonant charge sensor with responsivity enhanced by introducing dual single-stage microleverage mechanisms (microlevers) is presented. The sensor is based on the mechanism of detecting the resonant frequency shift of a single-crystal silicon double-ended tuning fork (DETF) element due to the axial compression generated by the additional charge and transformed by the microlevers. An analytic model comprising both mechanical and electrical subsystems was derived. The system-level simulation was carried out to optimize the critical dimensions and responsivity that coincides with the theoretical solution. The resonator has a nominal resonant frequency of 166 kHz and the amplification factor is more than 8. Simulation results suggest that the responsivity of the charge sensor is 1.38 x 10(-3)Hz/fC(2). Finally, the device was fabricated in a commercial standard siliconon-insulator (SOI) micromachining process to reduce the parasitic capacitance more effectively by back-side release.
NEW HINGED MICROMACHINED HIGH-g ACCELEROMETER: MODELLING AND MECHANICAL ANALYSIS

Yun LU,ZhiNong XU,LuFeng CHE

DOI: https://doi.org/10.16579/j.issn.1001.9669.2007.03.011

2007-01-01

Abstract:A new hinged micromachined piezoresistive high-g accelerometer is designed and modeled. A novel structure design can significantly increase the sensor s natural frequency while maintaining a high sensitivity. A simplified analytical model and a improved analytical model is established to describe the accelerometer's mechanical behaviour. Finite element modelling was also conducted to verify two analytical models and evaluate the performance of the micro-accelerometer. In the improved analysis, the effects that the mass of beam and hinge and the deformation of the mass have on the performance of the accelerometer have been taken into account. Comparison of the frequency results obtained from the improved analytical model and finite element simulation shows good agreement. Finally, the optimal selection of the geometrical parameters of the accelerometer was obtained from the analysis.
A MEMS Piezoelectric In-Plane Resonant Accelerometer Based on Aluminum Nitride with Two-Stage Microleverage Mechanism

Yixiang Wang,Hong Ding,Xianhao Le,Wen Wang,Jin Xie

DOI: https://doi.org/10.1016/j.sna.2016.12.019

IF: 4.291

2016-01-01

Sensors and Actuators A Physical

Abstract:In this paper, we firstly present a MEMS (micro-electromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage microleverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). A configuration with centrosymmetrically-distributed DETF resonators and two-stage microleverage mechanisms are proposed in the piezoelectric resonant accelerometer. The optimized configuration maximizes the length of DETF resonator in a given area and the leverage mechanism amplifies the inertia force. Both these two features enhance the sensitivity of the resonant accelerometer. The sensitivity of the device is 28.4Hz/g and the relative sensitivity is 201ppm/g (at the base frequency around 140.7kHz), which are 57% and 268% higher than previously reported data. The nonlinearity characteristic and features of differential structure are also studied.
A micromachined resonant accelerometer

Jie Ren,Shangchun Fan,Luda Wang,Zhanshe Guo

DOI: https://doi.org/10.1117/12.717649

2006-01-01

Abstract:Micromechanical resonant sensors are very attractive for high-precision measurement applications due to their high sensitivity, direct frequency output and large dynamic range. This paper presents a high accuracy micromechanical resonant accelerometer on basis of detailed investigation. The structure includes a substrate, a proof mass, cantilevers, leverage mechanisms, resonant beam, tuning forks, driving poles and checking poles. Due to the 'square' shape structure of proof mass, a larger inertial force generated by the proof mass can be achieved. DETF (double-ended tuning fork) resonator is the simplest form of stress sensitive dynamically balanced structure that can reduce the common mode interference. There are comb electrodes on both sides of the DETF, which are used to actuate the DETF and sense its amplitude in resonant state. Differential output is achieved by two tuning forks that are symmetrical distributed and the energy output is two times that of one double-ended tuning fork. This kind of structure can also reduce the co-model disturbance. The structure parameters and capability parameters are calculated by MATLAB, and mechanical and model analysis are carried out by ANSYS. Simulating results show that the design is available and the structure can satisfy the design demands.
Micromechanical resonant electrostatic charge sensor with micro-leverage mechanisms

Jiuxuan Zhao,Hong Ding,Jin Xie

DOI: https://doi.org/10.1109/NEMS.2015.7147386

2015-01-01

Abstract:A micromachined resonant electrostatic charge sensor with enhanced responsivity by introducing dual single-stage micro-leverage mechanisms is presented. The sensor is based on the detection of resonant frequency shift of a single-crystal silicon double-ended tuning fork (DETF) element due to the axial compressive generated by the additional charge and transformed by the micro-levers. An analytic model was derived in detail comprising both mechanical and electrical subsystems. The quality factor of the resonator is about 4,900 at an operating pressure of 40 mTorr, with a nominal resonant frequency of 139 kHz. The amplification factor of the double micro-levers excides 8. In addition, we experimentally demonstrated that the responsivity enhanced and the sensitivity is 21 fC under 4 ppm frequency fluctuation.
Bulk-Micromachined Silicon Resonant Accelerometer

Anping Qiu,Yan Su,Xinhua Zhu,Qin Shi

DOI: https://doi.org/10.1109/ICINFA.2009.5205115

2009-01-01

Abstract:A micromechanical silicon resonant accelerometer (SRA) with micro leverage mechanism amplifying the inertial force is presented. SRA consists of a pair of double-ended tuning forks (DETF), a proof mass and a micro lever mechanism. Firstly, the relation between frequency shift and applied force of DETF is modeled with the classical Bernoulli-Euler beams theory and then simulated by the finite element analysis (FEA). The conclusion is that analytical analysis results are very close to simulation results. Secondly micro leverage mechanism is presented, and the equations for calculating the amplification factor are derived. The effect of pivot spring and output system constants on the amplification factor is analyzed. According to the analytical results, the SRA is designed and fabricated. Comparison of the obtained experimental results and analytical results shows good agreement.
Structural Design and Testing of a Micromechanical Resonant Accelerometer

Heng Liu,Yu Zhang,Jiale Wu

DOI: https://doi.org/10.3390/mi13081271

IF: 3.4

2022-08-08

Micromachines

Abstract:Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage. However, there is a high-order nonlinear relationship between the output frequency and the induced acceleration, so it is difficult to obtain the theoretical basis to guide the microstructure design. In this study, the dynamic equation for this type of accelerometer was established under the condition of the stiffness of the folded beams being much less than that of the resonant beams. The sensitivity was obtained first, and then silicon-based microstructures were fabricated, for which metal tube-shell vacuum packaging was adopted. The two static driving capacitances were about 0.88 pF, and the detection capacitances were about 0.38 pF in the experimental test. The sensitivity was 44.5 Hz/g when the detection voltage was 1V, while it was greater than 300 Hz/g when the detection voltage was 3V. With an increase in the detection and driving voltages, a coupling phenomenon occurred between the vibration amplitude and frequency of the resonant beam. The double-stage folded beam failed at a high detection voltage larger than 10 V. Through the experiment, a numerical simulation model for the accelerometer was established, providing the basis for a closed-loop control circuit design.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Nonlinear Analysis for Micromachined Accelerometer Based on Resonant Principle

郝一龙,贾玉斌

DOI: https://doi.org/10.3969/j.issn.1672-6030.2003.01.006

2003-01-01

Nanotechnology and Precision Engineering

Abstract:The operation principle of resonant accelerometer is described. The analysis shows the characteristic parameter for resonant accelerometer, FS, is a theoretical basis of its design. The non-linearity increases with the increase of the frequency change rate, which does not depend on the thickness of the resonant beam. The non-linear behavior is studied theoretically in detail, which indicates that the non-linear terms of quasi-resonant oscillator are affected by both the amplitude, Am , and non-linear factor,γ . In order to avoid non-linear behavior , the driving amplitude should be small.
Design and Realization of Comb-Finger Micromechanical Accelerometer

李童杰,董景新,刘云峰

DOI: https://doi.org/10.3969/j.issn.1004-1699.2009.03.006

2009-01-01

Abstract:As an important device of MEMS,Micromechanical accelerometer has been widely used in commercial and military fields.This paper presents the design and realization of the Micromechanical accelero-meter.At first,the configuration principle and mathematical model of the Micromechanical accelerometer servo system,especially the relationships among its parts,are discussed.And then,key parameters,which are preload voltage,PID correction parameters and feedback gain,are specific analyzed.Finally,the accelerometer is tested in the lab,the measurement range of it is ±15 gn,the nonlinear scale is 0.041 9%,the threshold value is 0.1 mgn,the standard deviation of two hours operating is 0.084 5 mgn and the 20 times turn-on repeatability error is 0.156 mgn.

A new analytical model of single-stage microleverage mechanism in resonant accelerometer

A New Analytical Model of Single-Stage Microleverage Mechanism in Resonant Accelerometer

Calculation and Improvement on Amplification Effect of MEMS Leverage Mechanism

Design Of A High-Sensitivity Micromechanical Resonant Accelerometer With A Two-Stage Microlever

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

A New Type of MEMS Accelerometer with Up-Tuning Structure

A Mems Piezoelectric In-Plane Resonant Accelerometer With Two-Stage Micro-Leverage Mechanism

A Highly Sensitive Biaxial Resonant Accelerometer with Two-Stage Microleverage Mechanisms

Pull-In Dynamics of Two MEMS Parallel-Plate Structures for Acceleration Measurement

A Novel Biaxial Resonant Micro Accelerometer with Microleverage Mechanism

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Critical Technologies in Design of Micromechanical Resonant Accelerometer

Design, Analysis, and System-Level Simulation of A Micromachined Resonant Charge Sensor with Microleverage Mechanisms

NEW HINGED MICROMACHINED HIGH-g ACCELEROMETER: MODELLING AND MECHANICAL ANALYSIS

A MEMS Piezoelectric In-Plane Resonant Accelerometer Based on Aluminum Nitride with Two-Stage Microleverage Mechanism

A micromachined resonant accelerometer

Micromechanical resonant electrostatic charge sensor with micro-leverage mechanisms

Bulk-Micromachined Silicon Resonant Accelerometer

Structural Design and Testing of a Micromechanical Resonant Accelerometer

Nonlinear Analysis for Micromachined Accelerometer Based on Resonant Principle

Design and Realization of Comb-Finger Micromechanical Accelerometer