Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis
Yan Li,Biao Jin,Mengyu Zhao,Fuling Yang
DOI: https://doi.org/10.3390/mi12050530
IF: 3.4
2021-05-07
Micromachines
Abstract:This study aims to develop methods to design and optimize the resonator in a resonant accelerometer based on mode and frequency analysis. First, according to the working principle of a resonant accelerometer, the resonator is divided into three parts: beam I, beam II, and beam III. Using Hamilton’s principle, the undamped dynamic control equation and the ordinary differential dynamic equation of the resonant beam are obtained. Moreover, the structural parameters of the accelerometer are designed and optimized by using resonator mode and frequency analysis, then using finite element simulation to verify it. Finally, 1 g acceleration tumbling experiments are built to verify the feasibility of the proposed design and optimization method. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 98 Hz/g, a resolution of 0.917 mg, and a bias stability of 1.323 mg/h. The research findings suggest that according to the resonator mode and frequency analysis, the values of the resonator structural parameters are determined so that the working mode of the resonator is far away from the interference mode and avoids resonance points effectively. The research results are expected to be beneficial for a practical resonant sensor design.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied