Abstract:Flexible integrated circuits, working as the core unit of information processing, have been a subject of extensive research; they are essential to realize fully flexible electronic systems, which possess advantages over the current hybrid flexible systems (part or all based on rigid silicon chips) because of their extended application forms, better adaptability, and greater ability to operate at biotic/abiotic interfaces. To a great extent, the deliverable functionality of the ultimate integrated system is determined by the information handling capability of flexible integrated circuits, which is highly dependent on their performance and integration scale. Additionally, as the applications of flexible electronic systems become increasingly favorable in portable, wearable, or remote forms with a restrained power supply, the power dissipation of flexible integrated circuits becomes crucial, as they consume considerable energy in a system. Due to the restricted fabrication circumstances on flexible substrates with a low thermal budget and complex working environments (from the perspectives of both mechanical and electrical conditions), pursuing flexible integrated circuits with high performance, decent integration scale, and low power consumption is very challenging, but it is necessary for advanced, fully flexible systems. Other characteristics, such as biocompatibility, degradability, and configurability, would add value to flexible integrated circuits and introduce unconventional forms and new deliverables for flexible electronics. In this Account, we summarize our efforts toward developing carbon nanotube-based flexible integrated circuits over the past five years. As promising candidates for constructing next-generation chips, carbon nanotube-based integrated circuits have demonstrated their superiority in performance and power consumption, and we extend these advancements to a flexible form through material optimization, device design, processing technology development, etc. We start with a brief introduction to carbon nanotube properties to reveal their intrinsic advantages as channel materials for next-generation electronics. Next, we discuss the manufacturing methods we developed to construct integrated circuits on flexible substrates via a direct fabrication or transfer process to maintain these advantages and fit the circuits to different application circumstances. Then, demonstrations of carbon nanotube-based flexible integrated circuits with different forms and characteristics are presented, including (1) the implantation of complementary metal-oxide-semiconductor circuits on ultrathin substrates with high performance, (2) transferrable integrated circuits with a biointegration capability and low power consumption, (3) degradable integrated circuits manufactured at the wafer scale with a high yield and high uniformity, and (4) configurable integrated circuits with multiple functions. Integrated flexible sensor systems constructed with some of these circuits have also been introduced. Finally, we end the Account with an overview of the remaining challenges and new opportunities that have been opened up for carbon nanotubes in flexible integrated circuits and new forms of electronics.

Carbon Nanotube Dual-Material Gate Devices for Flexible Configurable Multifunctional Electronics

Configurable Multifunctional Integrated Circuits Based On Carbon Nanotube Dual-Material Gate Devices

Monolithic Three‐dimensional Integration of Aligned Carbon Nanotube Transistors for High‐performance Integrated Circuits

Intrinsically Flexible All-Carbon-nanotube Electronics Enabled by a Hybrid Organic–inorganic Gate Dielectric

Floating Gate Carbon Nanotube Dual-Gate Field-Effect Transistor for Reconfigurable AND/OR Logic Gates

Flexible CMOS Integrated Circuits Based on Carbon Nanotubes with Sub-10 Ns Stage Delays

Gate-tunable carbon nanotube-MoS2 heterojunction p-n diode

Flexible Integrated Circuits Based on Carbon Nanotubes

Nanoelectromechanical Switches with Vertically Aligned Carbon Nanotubes

A Novel Nanosheet Reconfigurable Field Effect Transistor with Dual-Doped Source/drain

Locally Thinned, Core-Shell Nanowire-Integrated Multi-gate MoS2 Transistors for Active Control of Extendable Logic

Carbon nanotube-based flexible electronics

Three-Dimensional Flexible Complementary Metal-Oxide-Semiconductor Logic Circuits Based on Two-Layer Stacks of Single-Walled Carbon Nanotube Networks.

Carbon Nanotube Self-Gating Diode and Application in Integrated Circuits

Logic circuits composed of flexible carbon nanotube thin-film transistor and ultra-thin polymer gate dielectric

Carbon nanotube transistors with graphene oxide films as gate dielectrics

Matched printed carbon nanotube complementary metal-oxide-semiconductor (CMOS) devices for flexible circuits

Use of Ambipolar Dual-Gate Carbon Nanotube Field-Effect Transistor to Configure Exclusive-OR Gate

Double‐Gate MoS2 Field‐Effect Transistors with Full‐Range Tunable Threshold Voltage for Multifunctional Logic Circuits

(Invited) High-Performance Carbon Nanotube Based Flexible Electronics for Integrated Smart Sensor System

Fully-Printed Flexible Dual-Gate Carbon Nanotube Thin-Film Transistors with Tunable Ambipolar Characteristics for Complementary Logic Circuits.