Abstract:Lithium niobate, with its wide applications in optics and mechanics, is a chemically inert material, and fabrication techniques for microscale and nanoscale structures of lithium niobate are to be developed. In this report, we demonstrate fabricating high-quality lithium niobate microdisk resonators and nanobeam photonic crystal cavities, using electron beam lithography and ion milling. Our devices exhibit high optical quality (Q) factors, paving the way for cavity nonlinear optics and cavity opto-mechanics of lithium niobate. Summary of Research: Lithium niobate, LiNbO3, with its large optical nonlinearities, wide transparency window, high optical damage threshold, and high mechanical stiffness, has been widely studied in the fields of optics and mechanics for decades. Recently, LiNbO3 on insulator thin film wafers are available, giving us opportunities to study optical, mechanical and electrical properties of LiNbO3 in the microscale. However, since LiNbO3 does not efficiently react with commonly used etching chemicals, its fabrication is nontrivial. A variety of fabrication techniques have been explored to make optical waveguides or resonators with LiNbO3, including titanium diffusion [1], hybrid waveguiding [24], machining [5], laser writing [6], and direct ion etching [710]. Direct ion etching, which uses standard electron beam lithography and ion milling, is potentially capable of defining microscale and nanoscale lithium niobate structures with high optical confinement and small footprints, and thus is selected by us to fabricate microdisk resonators and nanobeam photonic crystal cavities. Our devices show high optical qualities (Q > 106 for microdisk resonators and Q > 105 for nanobeam photonic crystal cavities), and are promising for onchip nonlinear optics, quantum photonics, and optomechanics. Figure 1: (a) A scanning electron microscopy picture, and (b) a telecom-band cavity resonance and its Lorentzian fitting, of a typical fabricated lithium niobate microdisk resonator. (See cover!) Figure 2: (a) (b) SEM pictures, and (c) broadband transmission spectrum, of a typical fabricated lithium niobate nanobeam photonic crystal cavity. Insets: zoom-in cavity resonances and Lorentzian fittings.

Microdisk Resonators with Lithium-Niobate Film on Silicon Substrate

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Lithium Niobate Microdisk Resonators on a Chip (conference Presentation)

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Fabrication of High-Q Crystalline Microresonators by Femtosecond Laser Direct Writing for Phase Matched Second Harmonic Generation

Lithium niobate micro-disk resonators of quality factors above 10^7

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

High-Q Lithium Niobate Microdisk Resonators on A Chip for Efficient Electro-Optic Modulation

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Ultrahigh quality-factor microresonators fabricated in pristine lithium niobate thin film for efficient nonlinear optics applications

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Microresonators in Lithium Niobate Thin Films

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Lithium Niobate MicroStructures CNF Project Number : 1997-11 Principal Investigator

Integrated Lithium Niobate Microring Resonators Fabricated With 515 nm Femtosecond Laser Ablation

On-chip Microdisk Laser on Yb3+-doped Thin-Film Lithium Niobate

Niobate-on-Niobate Resonators with Aluminum Electrodes