Rapid fabrication of microlens arrays on PMMA substrate using a microlens array by rear-side picosecond laser swelling

Jiang Li,Wenjun Wang,Xuesong Mei,Aifei Pan,Bin Liu,Jianlei Cui

DOI: https://doi.org/10.1016/j.optlaseng.2019.105872

IF: 5.666

2020-01-01

Optics and Lasers in Engineering

Abstract:•Microlens was produced.•Mechanism was analyzed.•Structures were usable for imaging.

What problem does this paper attempt to address?

A Fast and Efficient Fabrication Method for Microlens Array by Using Picosecond Laser Induced Volume Swelling

Bing Hu,Jinyou Shao,Yucheng Ding,Bin Liu,Linlin Miao,Haipeng Zhai

DOI: https://doi.org/10.1364/ltst.2012.mth5c.5

2012-01-01

Abstract:This paper presents a fast and efficient fabrication method for microlens array by using laser swelling. A picosecond laser with wavelength of 532nm and a methyl red doped polymethylmethacrylate (PMMA) film are used in experiments.
Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Jiale Yong,Feng Chen,Qing Yang,Guangqing Du,Hao Bian,Dongshi Zhang,Jinhai Si,Feng Yun,Xun Hou

DOI: https://doi.org/10.1021/am402923t

2013-10-09

Abstract:A fast and single-step process is developed for the fabrication of low-cost, high-quality, and large-area concave microlens arrays (MLAs) by the high-speed line-scanning of femtosecond laser pulses. Each concave microlens can be generated by a single laser pulse, and over 2.78 million microlenses were fabricated on a 2 × 2 cm(2) polydimethylsiloxane (PDMS) sheet within 50 min, which greatly enhances the processing efficiency compared to the classical laser direct writing method. The mechanical pressure induced by the expansion of the laser-induced plasmas as well as a long resolidifing time is the reason for the formation of smooth concave spherical microstructures. We show that uniform microlenses with different diameters and depths can be controlled by adjusting the power of laser pulses. Their high-quality optical performance is also demonstrated in this work.
Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification

Yan Ou,Qing Yang,Feng Chen,Zefang Deng,Guangqing Du,Jiuhong Wang,Hao Bian,Jiale Yong,Xun Hou

DOI: https://doi.org/10.1109/lpt.2015.2459045

IF: 2.6

2015-01-01

IEEE Photonics Technology Letters

Abstract:Reported here is the direct fabrication of the convex microlens arrays on poymethylmethacrylate using laser-induced structural modification. Based on single femtosecond pulse in situ modification, sixty thousand convex microlenses, whose diameters was <12 mu m, could be fabricated per minute, exhibiting much higher efficiency than conventional laser direct writing technique. The formation mechanism was mainly attributed to photodecomposition, which would result in the scission of polymer chains. The shape of microlenses could be tuned by the laser power. In addition, the good optical performance of the microlens was revealed by its ability of high resolution imaging. This technique may open up a new way of preparing low-cost and large-area convex structure which is widely used in many advanced microdevices, such as lab-on-chips and biomimetic compound eyes.
Large-area Microlens Arrays Fabricated on Flexible Polycarbonate Sheets Via Single-Step Laser Interference Ablation

Rui Guo,Dajun Yuan,Suman Das

DOI: https://doi.org/10.1088/0960-1317/21/1/015010

2010-01-01

Journal of Micromechanics and Microengineering

Abstract:A single-step method for the fabrication of large-area microlens arrays on flexible polycarbonate sheets is described. On areas of approximately 1 cm(2), 17 million to 120 million microlenses ranging in size from sub-micrometer to several micrometers are fabricated via deep-UV pulsed laser interference ablation. The uniformity and surface quality of fabricated microlens arrays are examined and confirmed through atomic force microscopy and scanning electron microscopy. Optical imaging performance of the microlenses, and their use in massively parallel, pulsed laser nanofabrication on silicon is demonstrated. The microlens arrays can be fabricated in a matter of seconds, suggesting the potential for fast and low-cost production on flexible plastic substrates.
Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process

Hewei Liu,Feng Chen,Qing Yang,Yang Hu,Chao Shan,Shengguan He,Jinhai Si,Xun Hou

DOI: https://doi.org/10.1117/12.905942

2012-01-01

Abstract:We demonstrate a facile and flexible method to fabricate close-packed microlens arrays (MLAs). Glass molding templates with concave structures are produced by a femtosecond (fs)-laser point-by-point exposures followed by a chemical treatment, and convex MLAs are subsequently replicated on Poly(methyl methacrylate) [PMMA] using a hot embossing system. As an example, a microlens array (MLA) with 60-mu m rectangular-shaped spherical microlenses is fabricated. Optical performances of the MLAs, such as focusing and imaging properties are tested, and the results demonstrate the uniformity and smooth surfaces of the MLA. We also demonstrated that the shape and alignment of the arrays could be controlled by different parameters.
Fabrication of microstructures by picosecond laser

Jiang Li,Ruixiang Zhu,Yuxiang Huang

DOI: https://doi.org/10.1016/j.ijleo.2021.166501

IF: 3.1

2021-04-01

Optik

Abstract:<p>Microstructures assume crucial role in preparation of functional surfaces, such as self-cleaning, anti-icing and drag reduction. In the paper, picosecond laser is used for the fabrication of the microstructures by the balanced photothermal and photochemical action. In order to improve the controllability of structural dimensions, we reported on fabrication of smooth swelling by picosecond laser irradiation of two-layer substrate. The upper layer is swelling doped PMMA; the lower layer is black acrylic. This work first obtained different microlines by tuning the scanning speed through focusing on the interface. Then, different swelling structures were fabricated by adjustment of laser irradiation time. Further, the dependence of swelling morphology on irradiation time and laser power were studied. For the different swellings, the microlens array was obtained by replication and the imaging performance was tested. This demonstrated the possibility of the method for preparation of the microlens array and other functional microstructures.</p>

optics
A Microlens Array with Different Focal Lengths Fabricated by Roll-To-Roll UV Lithography

Huichun Ye,Lianguan Shen,Mujun Li,Likai Li

DOI: https://doi.org/10.1177/096739111802600203

2018-01-01

Abstract:A simple, highly efficient and low cost roll-to-roll (R2R) UV imprinting lithography facility was achieved for fabricating micro-structures. Firstly, a novel microlens array with focuses distributed on a curved surface was designed and analyzed by an optical software ZEMAX. Then an ultra-precision diamond machine was applied to generate the freeform microlens array features on the master mold, and a belt type polydimethylsiloxane (PDMS) mold with a microlens array pattern was prepared from the machined master mold. The R2R process was employed to replicate the microlens arrays, followed by an evaluation of their profiles and optical properties. Our experiments demonstrate that the applied method is reliable and efficient for producing the polymeric microlens arrays.
Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Fan Hua,Cao Xiao-Wen,Li Zhen-Ze,Wang Yi,Wang Lei,Xu Ying

DOI: https://doi.org/10.37188/CJLCD.2020-0334

2021-01-01

Chinese Journal of Liquid Crystals and Displays

Abstract:As a basic micro-optics element, microlens has widespread applications in many fields, whereas the common fabrication methods for microlens compounded from transparent and brittle materials always have a low efficiency and high requirement for environment. Liquid crystal spatial light modulation (SLM) as a light modulation instrument, can realize multi-focus or structured light fields easily, and has important potential application values in optical communication or microfabrication based on ultrafast laser. Herein, a fabrication method is introduced for microlens, which combines the advantages of femtosecond (Fs) laser microfabrication and wetting etch. The key factors influencing the morphology of microlens are analyzed systematically. By introduction of the spatial light field modulation in the femtosecond laser micro/nano fabrication, the number as well as the position of focused spots can be finely controlled, which not only greatly enhances the fabrication efficiency of microlens arrays out of transparent and brittle materials, but also makes it possible to adjust the morphology of femtosecond laser ablation modification dynamically during processing. The application of spatial light field modulation in micro-photonic integrated chip fabrication is well demonstrated.
Microlens Arrays Fabricated on Polycarbonate Sheets Via Pulsed Laser Maskless Interference Patterning

Rui Guo,Dajun Yuan,Suman Das

DOI: https://doi.org/10.2351/1.5062134

2010-01-01

Abstract:A method is developed to fabricate large areas of microlens arrays on flexible substrates of polycarbonate sheets via maskless laser interference patterning. A frequency quadrupled nanosecond pulsed Nd:YAG laser with 266nm wavelength is used to generate two-beam interference patterns. Crossed-grid periodical patterns are fabricated through double exposure by turning the sample 90 degrees between exposures. The microlens array period is adjustable from submicron to many microns by changing the interference angles. From Atomic Force Microscope (AFM) and Scanning Electron Microscope (SEM) measurements, representative 3.2µm, 2.4µm, and 900nm diameter microlens arrays are obtained on the modified area spanning one square centimetre. Optical property tests show that the microlens array can be used for imaging. Although the experimental results are demonstrated on polycarbonate substrates, the method can be applied to other materials which are suitable for deep-UV laser ablation. The experimental results suggest that our method has the potential for fast and low-cost production of microlens arrays on flexible polymer substrates.
Fabrication of High Integrated Microlens Arrays on a Glass Substrate for 3D Micro-Optical Systems

Yang Wei,Qing Yang,Hao Bian,Feng Chen,Minjing Li,Yanzhu Dai,Xun Hou

DOI: https://doi.org/10.1016/j.apsusc.2018.06.267

IF: 6.7

2018-01-01

Applied Surface Science

Abstract:Microlens array have been developed as an essential element in integrated micro-optical systems. However, rapidly fabrication of high integration, high fill factor and multi-layer microlens arrays on a hard material is still a challenge. Here, facilely designed high integrated double-sided concave microlens arrays were proposed. These concave microlens arrays possess nearly 5000 close-packed microlenses on a double sides glass substrate, which were created by femtosecond laser wet etch process. The optical properties of integrated microlens arrays were investigated, which exhibit novel diverse imaging patterns, such as coaxial nested rectangular-shaped, coaxial nested hexagonal-shaped, non-coaxial nested hexagonal-shaped imaging patterns, etc. Moreover, diverse imaging patterns can be simply realized by controlling the shape, the size of the microlenses and the arrangement of the microlens arrays on the double-sided glass chips.
One-step Fabrication of Achromatic Spherical Microlens Array on Enzyme Etched Gelatin Film

Jianhua Zhu,Chongwei Jin,Xiaoya Duan,Yongkang Guo,Jun Yao

DOI: https://doi.org/10.1016/j.mee.2008.11.049

IF: 2.3

2009-01-01

Microelectronic Engineering

Abstract:Achromatic spherical microlens array is fabricated successfully on gelatin film by combining the highly efficient techniques of one-step gray-tone photolithography and novel enzyme etched silver-halide-sensitized gelatin. The microlens array has spherically continuous surface relief profile, 100% fill factor and high energy efficiency, and is ready for UV-vis-NIR broadband applications. The gray-tone mask design, reflection-type projection photolithography setup, enzyme etching processing, and the characterization of fabricated 11 x 11 gelatin microlens array, are presented in this paper. (C) 2008 Elsevier B.V. All rights reserved.
Micropatterning Microlens Arrays Fabricated by A Femtosecond Laser Wet Etch Process

Yang Wei,Qing Yang,Hao Bian,Feng Chen

DOI: https://doi.org/10.1117/12.2257855

2017-01-01

Abstract:Microlens arrays with specially required micropatterns are highly desirable for digital optical processors, microimaging systems, optical photolithography as well as various biomedical imaging and detecting applications. However, realization of such devices efficiently remains technically challenging. Here, a facile and efficient route for large-area microlens arrays (MLAs) with programmable micropatterns is demonstrated. The fabrication process involves a femtosecond laser wet etch process combined with the replication process of hot embossing. Special arranged microlens arrays, including a doublet microlens array, a three-microlens group array, a four-microlens group array, and a six-petal-like microlens array as examples, were fabricated by this method. The fabricated MLAs exhibit excellent surface morphology quality and optical imaging properties. This presented technique provides an efficient way to flexibly design the size, shape and the arrangement of the MLAs by adjusting the process parameters such as the pulse energy, the number of shots etching time and the distribution of ablation-induced craters and Programming arrangement.
Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Fan Zhang,Qing Yang,Hao Bian,Feng Chen

DOI: https://doi.org/10.1117/12.2257841

2017-01-01

Abstract:In the last decades, fabrication of microlens array in materials with high-damage threshold has attracted increasing interest, especially in the application of high-power laser. In this paper, we propose an advanced strategy to efficiently fabricate microlens array on the surface of glass using a single-pulsed femtosecond laser wet etch process, which is a combination of high-speed laser scanning and the subsequent chemical etch with HF solution. Based on this method, double-sided microlens array, non-regular arrays consisting of close-packed concave microlens array on one side and regular concave MLA on the other side, were fabricated on the 1cm*1cm glass. Especially over one million microlenses could be acquired within an hour, exhibiting great superiority in practical application. Moreover, the optical properties of the asymmetric double-sided MLA were experimentally characterized, and the experimental results reveal the good light homogenization performance.
Fabrication of Microstructures by Rear-Side Picosecond Laser Irradiation of Two-Layer PMMA

Jiang Li,Wenjun Wang,Xuesong Mei,Aifei Pan

DOI: https://doi.org/10.1117/12.2306705

2018-01-01

Abstract:Micro-structures offer superior functions such as superhydrophobicity, selfcleaning, anti-wear and drag reduction. In this paper, various microstructures were fabricated by rear-side picosecond laser irradiation of two-layer materials. The material of underlying layer was commonly commercial available ink; the material of surface layer was PMMA. The high light absorptivity of underlying material result in significantly reduced absorption depth. The laser source could therefore be regarded as plane heat source, leading to better surface morphologies after the mater-laser interaction. The results showed that convex structures were obtained at a lower laser fluence; with increase of laser fluence, a doughnut-like structures were obtained; with further rise of laser fluence, bowl-like structures would be obtained. Moreover, the size of microstructures could be tuned by adjusting laser processing parameters such as laser power, frequency and laser-mater interaction time. This method provides an insight for fabrication of functional surface.
Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Linyu Yan,Dong Yang,Qihuang Gong,Yan Li

DOI: https://doi.org/10.3390/mi11020112

IF: 3.4

2020-01-01

Micromachines

Abstract:Femtosecond laser direct writing through two-photon polymerization has been widely used in precision fabrication of three-dimensional microstructures but is usually time consuming. In this article, we report the rapid fabrication of continuous surface Fresnel lens array through femtosecond laser three-dimensional focal field engineering. Each Fresnel lens is formed by continuous two-photon polymerization of the two-dimensional slices of the whole structure with one-dimensional scan of the corresponding two-dimensional engineered intensity distribution. Moreover, we anneal the lens array to improve its focusing and imaging performance.
Rapid Fabrication of A Large-Area Close-Packed Quasi-Periodic Microlens Array on Bk7 Glass

Feng Chen,Zefang Deng,Qing Yang,Hao Bian,Guangqing Du,Jinhai Si,Xun Hou

DOI: https://doi.org/10.1364/ol.39.000606

2014-01-01

Abstract:Large-area close-packed microlens arrays (MLAs) are highly desirable for structured light and integrated optical applications. However, efficient realization of ultralarge area MLAs with a high fill factor is still technically challenging, especially on glass material. In this Letter we propose a high-efficiency MLA fabrication method using single-pulsed femtosecond laser wet etch and close-packed quasi-periodic concave MLAs consisting of three million units fabricated on silica glass within an hour. The fabricated MLAs are demonstrated to have extreme optical smoothness (∼8.5 nm) by an atomic force microscope. It has also been demonstrated that the profile of the quasi-periodic concave structures could be easily tuned by changing the laser scanning speed or the pulse energy. Additionally, the optical performances of the MLA diffusers were investigated by using sharp focusing, high-resolution imaging, and flat-top illumination.
Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

Yang Hu,Qing Yang,Feng Chen,Hao Bian,Zefang Deng,Guangqing Du,Jinhai Si,Feng Yun,Xun Hou

DOI: https://doi.org/10.1016/j.apsusc.2013.11.132

IF: 6.7

2013-01-01

Applied Surface Science

Abstract:This paper presents a cost-efficient and flexible approach to the development of controllable-shape concave and convex microlens arrays by using femtosecond laser wet etch and replication techniques. Periodic concave rectangular-shaped microlens arrays with different length-width ratios were achieved by firstly introducing periodic microcraters on silica glass using an 800 nm femtosecond laser, and subsequently enlarging the craters into microlens with smooth curved surfaces in hydrofluoric (HF) acid solution. The concave microlens can serve as molds of replication to obtain convex microlenses on polymers. Over 10,000 rectangular-shaped concave and convex microlens with controllable aspect ratio, high fill factor and spherical morphology can be fabricated in 5 h. A simulation result and a projection experiment result verify the optical performance of these rectangular-shaped spherical microlens arrays (MLAs). Crown Copyright (C) 2013 Published by Elsevier B.V. All rights reserved.
Direct write of microlens array using digital projection photopolymerization

Yi Lu,Shaochen Chen

DOI: https://doi.org/10.1063/1.2838751

IF: 4

2008-01-28

Applied Physics Letters

Abstract:Microlens array is a key element in the field of information processing, optoelectronics, and integrated optics. Many existing fabrication processes remain expensive and complicated even though relatively low-cost replication processes have been developed. Here, we demonstrate the fabrication of microlens arrays through projection photopolymerization using a digital micromirror device (DMD) as a dynamic photomask. The DMD projects grayscale images, which are designed in a computer, onto a photocurable resin. The resin is then solidified with its thickness determined by a grayscale ultraviolet light and exposure time. Therefore, various geometries can be formed in a single-step, massively parallel fashion. We present microlens arrays made of acrylate-based polymer precursor. The physical and optical characteristics of the resulting lenses suggest that this fabrication technique is potentially suitable for applications in integrated optics.

physics, applied
Fabrication of Microlens Array with Well-Defined Shape by Spatially Constrained Thermal Reflow

Jinfeng Qiu,Mujun Li,Junjie Zhu,Chao Ji

DOI: https://doi.org/10.1088/1361-6439/aabd1d

2018-01-01

Journal of Micromechanics and Microengineering

Abstract:We demonstrate a novel method for fabricating a well-defined and large-area microlens array combining digital micro-mirror device (DMD)-based lithography and spatially constrained thermal reflow. Using the flexible processing ability of DMD-based lithography, a micro pillar array is easily prepared on a glass substrate and then the microlens array is formed after a thermal reflow process. Differing from conventional approaches, the proposed thermal reflow process is conducted in polydimethylsiloxane (PDMS) solution instead of in the air. During the process, the partly cured PDMS can effectively prevent the photoresist crawling in the diameter direction, which is very convenient for controlling the precise shape of the microlens. In addition, the photoresist microlens array and PDMS soft mold with a concave cavity array can be achieved in one step. The experimental results showed that the photoresist microlens was good in both shape and surface quality. The presented method may offer great promise for fabricating a high-quality microlens array with different requirements in optical applications.
Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging

Dejian Kong,Xiaoyan Sun,Limu Zhang,Youwang Hu,Ji-an Duan

DOI: https://doi.org/10.1016/j.optlastec.2024.110688

IF: 4.939

2024-02-20

Optics & Laser Technology

Abstract:Fused-silica-based microlens array (MLA) with different focal lengths is a significant optical element for multi-layer optical imaging. In this paper, we propose shaping picosecond laser-induced multi-step wet-etching to control the morphology of the MLA. A spatial light modulator (SLM) was employed to shape the Gaussian picosecond laser into multiple focal spots with different focal depths. The multiple focal spots induced the ablation regions with different depths inside the fused silica. As a result, the morphologies of the MLA could be controlled from the spherical surface to the aspheric surface. The diameter, sag height, vertex curvature radius, and cone coefficient of the aspheric surface could be readily controlled by the average pulse energy and the focal depths of each focal spot. The ratio between maximum vertex focal length and minimum vertex focal length could be adjusted between 1 and 9.52. Moreover, the patterned MLAs were used for multi-layer imaging and 3D code, which can be applied in optical storage or anti-fake. We believe that shaping picosecond laser induced multi-step wet-etching is a highly efficient and flexible approach to fabricate the micro-optical elements on fused silica.

optics,physics, applied

Rapid fabrication of microlens arrays on PMMA substrate using a microlens array by rear-side picosecond laser swelling

A Fast and Efficient Fabrication Method for Microlens Array by Using Picosecond Laser Induced Volume Swelling

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification

Large-area Microlens Arrays Fabricated on Flexible Polycarbonate Sheets Via Single-Step Laser Interference Ablation

Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process

Fabrication of microstructures by picosecond laser

A Microlens Array with Different Focal Lengths Fabricated by Roll-To-Roll UV Lithography

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Microlens Arrays Fabricated on Polycarbonate Sheets Via Pulsed Laser Maskless Interference Patterning

Fabrication of High Integrated Microlens Arrays on a Glass Substrate for 3D Micro-Optical Systems

One-step Fabrication of Achromatic Spherical Microlens Array on Enzyme Etched Gelatin Film

Micropatterning Microlens Arrays Fabricated by A Femtosecond Laser Wet Etch Process

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Fabrication of Microstructures by Rear-Side Picosecond Laser Irradiation of Two-Layer PMMA

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Rapid Fabrication of A Large-Area Close-Packed Quasi-Periodic Microlens Array on Bk7 Glass

Cost-efficient and Flexible Fabrication of Rectangular-Shaped Microlens Arrays with Controllable Aspect Ratio and Spherical Morphology

Direct write of microlens array using digital projection photopolymerization

Fabrication of Microlens Array with Well-Defined Shape by Spatially Constrained Thermal Reflow

Rapid fabrication of quasi-periodic aspherical concave microlens array with different focal lengths on fused silica by shaping picosecond laser-induced multi-step wet-etching for multi-layer optical imaging