Controllable Growth of Conductive Filaments in Sandwiched CBRAM Cells Using Self-Assembled Cu/W Multilayer Thin Films As the Electrodes

Leiwen Gao,Zhongxiao Song,Yanhuai Li,Guixiang Qian,Fei Ma
DOI: https://doi.org/10.1016/j.jallcom.2019.06.304
IF: 6.2
2019-01-01
Journal of Alloys and Compounds
Abstract:Self-assembled Cu/W multilayer thin films are fabricated and used as the top electrodes (TEs) in conductive-bridge random access memory (CBRAM) devices. The modulation period (lambda) of the Cu/W multilayer structure can be well controlled by changing the substrate rotation speed during magnetron sputtering. For the lambda value of 3.2 nm, the Al2O3 based CBRAM devices exhibits significantly improved resistive switching (RS) performances with effectively narrowed switching parameters and substantially increased OFF/ON ratio up to 10(4) at 0.10 V. Good reliability after 600 cycles is demonstrated and the retention time of 10 years at 85 degrees C is estimated through Arrhenius plot. In essential, the growth of conductive filaments (CFs) in Al2O3 layers is well controlled owing to the W-rich layer as the diffusion barrier. As a result, both the number and the size of CFs in Al2O3 layer are reduced if the lambda value is increased. Especially, volatile RS behavior is evidenced due to the extremely slow diffusion of Cu ions across the TE/Al2O3 interface and thus the formation of tiny CFs if the lambda value is up to 7.0 nm. A physical model is proposed to describe the controllable formation of CFs by using Cu/W multilayer TEs. (C) 2019 Elsevier B.V. All rights reserved.
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