Abstract:Ultraviolet (UV) laser-induced damage from defects and impurities in conventional ground and polished fused silica optics significantly hinders their application in high-power laser systems. Laser cleaning, as a non-contact and polishing fluid-free technology, is likely to be a key technology for improving the damage performance of fused silica optics. However, conventional laser cleaning primarily focuses on surface pollution without removing the material. It overlooks the detrimental effects of multiscale defects and impurities inside the fused silica. In this study, microsecond-pulsed CO2 laser cleaning was proposed to enhance the laser-induced damage threshold (LIDT) by ablating fused silica to nanometer depths. Through multiple-scale simulations, the thermal stress evolution and modulation mechanism of defects and impurities on the damage performance (ranging from the macro- to nanoscale) were revealed. Utilizing multimodal characterization, laser cleaning effectively eliminated and suppressed surface/subsurface defects, absorptive defects, chemical structural defects, and elemental impurities without introducing residual thermal stress and destroying surface roughness. In addition, the evolution of the molecular structures indicated a tendency for intrinsic defects to recombine into shorter-ring structures, which resulted in a densified fused silica surface. The laser-cleaned samples exhibited higher damage thresholds, achieving 47.6 % (0 % probability) and 27.0 % (100 % probability) improvements compared with uncleaned samples. This technology provides a new method for fabricating high damage threshold fused silica optics with superior surface quality for high-power laser applications.

Improvement of Rear Damage of Thin Fused Silica by Liquid-Assisted Femtosecond Laser Cutting

Traceless Mitigation of Laser Damage Precursors on a Fused Silica Surface by Combining Reactive Ion Beam Etching with Dynamic Chemical Etching

Repair of Fused Silica Damage Using Selective Femtosecond Laser-Induced Etching

Investigation on Hybrid Laser Ablation and Its Application in Fused Silica Damage Mitigation.

Improve the Laser Damage Resistance of Fused Silica by Wet Surface Cleaning and Optimized HF Etch Process

Study on the Absorption Characteristics and Laser Damage Properties of Fused Silica Optics under Flexible Polishing and Shallow DCE Process

Improving Uv Laser Damage Threshold Of Fused Silica Optics By Wet Chemical Etching Technique

Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica

Microsecond-pulsed CO2 laser cleaning of high damage threshold fused silica

Laser Induced Damage Characteristics of Fused Silica Optics Treated by Wet Chemical Processes

Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching

Controlling of Surface Ablation Threshold of Fused Silica by Double-Pulsed Femtosecond Laser

Morphology evolution mechanisms and localized structural modification of repaired sites on fused silica optics processed by CO2 laser rapid ablation mitigation

A two-step physical-chemical etching technique to improve laser damage resistance of fused silica

Research on Laser-Assisted Micro-Milling of Fused Silica

Study on Ablation Threshold of Fused Silica by Liquid-Assisted Femtosecond Laser Processing.

Mitigation Procedure for Damage on the Surface of Fused Silica Using a CO2 Laser Beam

Advanced Mitigation Process (AMP) for Improving Laser Damage Threshold of Fused Silica Optics

Improving the laser damage performance of fused silica by combining magnetorheological finishing with HF acid etching

Combined Etching Technology for Controlling Surface Damage Precursors to Improve Laser Damage Resistance of Fused Silica

Incident Laser Modulation of a Repaired Damage Site with a Rim in Fused Silica Rear Subsurface