Abstract:The damage repair of fused silica based on the CO2 laser repair technique has been successfully applied in high-power laser systems in the controllable nuclear fusion field. However, this kind of repairing technique mainly focuses on large-scale laser damage with sizes larger than 200 μm, but ignores the influence of cluster small-scale damage with sizes smaller than 50 μm. In order to inhibit the growth of small-scale damage and further improve the effect of fused silica damage repair, this paper carried out a study on the repair of fused silica damage using the magnetorheological (MR) removing method. The feasibility of fused silica damage repairing was verified, and the evolution law of the number, morphology, and the surface roughness of small-scale damage were all analyzed. The results showed that the MR removing method was non-destructive compared to traditional repairing technologies. It not only effectively improved the whole damage repairing rate to more than 90%, but it also restored the optical properties and surface roughness of the damaged components in the repairing process. Based on the study of the MR removing repair law, a combined repairing process of 4 μm MR removal and 700 nm computer controlled optical surfacing (CCOS) removal is proposed. A typical fused silica element was experimentally repaired to verify the process parameters. The repairing rate of small-scale damage was up to 90.4%, and the surface roughness was restored to the level before repairing. The experimental results validate the effectiveness and feasibility of the combined repairing process. This work provides an effective method for the small-scale damage repairing of fused silica components.

Improving the laser damage performance of fused silica by combining magnetorheological finishing with HF acid etching

Traceless Mitigation of Laser Damage Precursors on a Fused Silica Surface by Combining Reactive Ion Beam Etching with Dynamic Chemical Etching

Combined Technique of Elastic Magnetorheological Finishing and HF Etching for High-Efficiency Improving of the Laser-Induced Damage Threshold of Fused Silica Optics.

Improve the Laser Damage Resistance of Fused Silica by Wet Surface Cleaning and Optimized HF Etch Process

Experimental Research on Reducing Fused Silica Optics Laser-induced Damage Density Based on Contamination Control Techniques

Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching

Combined Etching Technology for Controlling Surface Damage Precursors to Improve Laser Damage Resistance of Fused Silica

Advanced Mitigation Process (AMP) for Improving Laser Damage Threshold of Fused Silica Optics

Study on the Absorption Characteristics and Laser Damage Properties of Fused Silica Optics under Flexible Polishing and Shallow DCE Process

Improving Uv Laser Damage Threshold Of Fused Silica Optics By Wet Chemical Etching Technique

A two-step physical-chemical etching technique to improve laser damage resistance of fused silica

Repair of Fused Silica Damage Using Selective Femtosecond Laser-Induced Etching

Rapid and Non-Destructive Repair of Fused Silica with Cluster Damage by Magnetorheological Removing Method

Reduction of the 355-Nm Laser-Induced Damage Initiators by Removing the Subsurface Cracks in Fused Silica

The Influence of Etching Depth on Surface Molecular Structures and Laser Damage Thresholds of Fused Silica by using Megasonic-assisted HF-based Etching

Effect of Polishing-Induced Subsurface Impurity Defects on Laser Damage Resistance of Fused Silica Optics and Their Removal with Hf Acid Etching

Laser Induced Damage Characteristics of Fused Silica Optics Treated by Wet Chemical Processes

The Infrared Spectra and Laser Damage Threshold of the Fused Silica after Megacoustic Field Assisted Hydrofluoric-Based Etching

Reaction ion etching process for improving laser damage resistance of fused silica optical surface

Enhancement of laser induced damage threshold of fused silica by acid etching combined with UV laser conditioning

Effect of femtosecond laser modification on magnetorheological finishing of magnesium aluminate spinel