Investigation of Al droplet wetting behavior on highly-oriented SiC

Song Zhang,Kaixin Zuo,Pengjian Lu,Qingfang Xu,Meijun Yang,Kai Liu,Rong Tu
DOI: https://doi.org/10.1039/d3ra03335j
IF: 4.036
2023-01-01
RSC Advances
Abstract:In the integrated circuit industry, metal liquids are frequently in contact with chemical vapor deposited (CVD) SiC, and it is important to understand the interactions between CVD-SiC and metal droplets.
chemistry, multidisciplinary
What problem does this paper attempt to address?