On-Demand Generation of Single Silicon Vacancy Defects in Silicon Carbide

Jun-Feng Wang,Qiang Li,Fei-Fei Yan,He Liu,Guo-Ping Guo,Wei-Ping Zhang,Xiong Zhou,Li-Ping Guo,Zhi-Hai Lin,Jin-Ming Cui,Xiao-Ye Xu,Jin-Shi Xu,Chuan-Feng Li,Guang-Can Guo
DOI: https://doi.org/10.1021/acsphotonics.9b00451
IF: 7
2019-01-01
ACS Photonics
Abstract:Defects in silicon carbide have been explored as promising spin systems in quantum technologies. However, for practical quantum metrology and quantum communication, it is critical to achieve on-demand single spin-defect generation. In this work, we present the generation and characterization of shallow silicon vacancies in silicon carbide by using different implanted ions and annealing conditions. The conversion efficiency of a silicon vacancy of helium ions is shown to be higher than that by carbon and hydrogen ions in a wide implanted fluence range. Furthermore, after optimizing the annealing conditions, the conversion efficiency can be increased more than 2 times. Due to the high density of the generated ensemble defects, the sensitivity of sensing a static magnetic field can be reached as high as eta(B) approximate to 23.5 mu T/root Hz, which is about 9 times smaller than previous results. By carefully optimizing implanted conditions, we further show that a single silicon vacancy array can be generated with a high conversion efficiency of about 80%. The results pave the way for using an on-demand-generated single silicon vacancy for quantum information processing and quantum photonics.
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