Hybrid Channel Induced Forming-Free Performance in Nanocrystalline-Si:H/a-sinx:h Resistive Switching Memory.

Yang Sun,Zhongyuan Ma,Dingwen Tan,Zixiao Shen,Jiayang You,Wei Li,Ling Xu,Kunji Chen,Duan Feng
DOI: https://doi.org/10.1088/1361-6528/ab2507
IF: 3.5
2019-01-01
Nanotechnology
Abstract:The unique forming-free feature of Si-based resistive switching memory plays a key role in the industrialization of next generation memory in the nanoscale. Here we report on a new forming-free nanocrystalline-Si: H (nc-Si: H)/SiNx:H resistive switching memory that can be obtained by deposition of hydrogen diluted nc-Si on hydrogen plasma treated a-SiNx: H layer. It is found that nc-Si dots with areal density of 5.6. x. 10(12)/cm(2) exist in nc-Si: H sublayer. Si dangling bonds (DBs) of volume density of 4.13 x 10(23) cm(-3) are produced in the a-SiNx:H sublayer. Temperature dependent current characteristic and theoretical calculations further reveal that hybrid channel of nc-Si and Si dangling bonds are the origin of the forming-free performance of nc-Si: H/SiNx:H resistive switching memory, which obey the trap assisted tunneling model at the low resistance state and P-F model at the high resistance state. Our discovery of hybrid channel supplies a new way to make Si-based RRAM be used in high density memory in the future.
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