Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Propagation of Laser-Induced Particles from Fused Silica

Spatial Sputtering of Fused Silica after a Laser-Induced Exploding Caused by a 355 Nm Nd: YAG Laser

Ejecta Distribution and Transport Property of Fused Silica under the Laser Shock Loading

Damage Behaviors of Silica Microparticles on Fused Silica Optics under 355 Nm High Fluence Laser

Laser-induced Damage Growth of Fused Silica at 351 Nm on a Large-Aperture High-Power Laser Facility

Fate of Ejected Debris from the Explosion of the Rear Surface of Fused Silica in the High-Power Laser Facility

Explosion Plume on the Exit Surface of Fused Silica During UV Laser- Induced Damage

Spatiotemporal Probe into the Femtosecond Laser Processing of Fused Silica

Mechanisms In Fs-Laser Ablation In Fused Silica

Generation of chemical deposits on fused silica optics and their modulation on the light intensity distribution

Simulation of Femtosecond Laser-Induced Periodic Surface Structures on Fused Silica by Considering Intrapulse and Interpulse Feedback

Interaction between sub-picosecond laser and fused silica

Behavior of 355 nm laser-induced damage growth in fused silica

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Propagation of a Filamentary Femtosecond Laser Beam with High Intensities at an Air-Solid Interface

Transient study on fused silica surface damage caused by dielectric particle contaminant in high-power laser system

Laser-induced Periodic Annular Surface Structures on Fused Silica Surface

Laser-damage Growth Characteristics of Fused Silica under 1064- and 532-Nm Laser Irradiation

Study of growth of laser initiated damage in fused silica at 3ω

Morphological Investigation at the Front and Rear Surfaces of Fused Silica Processed with Femtosecond Laser Pulses in Air.

Dynamics of filamentary damage induced by nanosecond laser in fused silica