Preparation and Characterization of Ultrathin WSi Films for Superconducting Nanowire Single-Photon Detectors

Jin Jin,Fengfeng Fu,Xiaoqing Jia,Lin Kang,Zhihe Wang,Xuecou Tu,Labao Zhang,Biao Bing Jin,Jian Chen,W. W. Xu,Peiheng Wu
DOI: https://doi.org/10.1109/TASC.2019.2898700
IF: 1.9489
2019-01-01
IEEE Transactions on Applied Superconductivity
Abstract:Film quality is the key factor for the performance of superconducting nanowire single-photon detectors with high detection efficiency. Using magnetron cosputtering, high-performance WSi ultrathin films are prepared on MgO (100), Si (100), and SiOX/Si substrates. The zero-resistance critical temperature (TC0) maintains a high value of ~5 K when the Si content approaches 15%-25% for all three substr...
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