High Efficiency, Large-Active-area Superconducting Nanowire Single-Photon Detectors

Gu Min,Zhang La-Bao,Kang Lin,Zhao Qing-Yuan,Jia Tao,Wan Chao,Xu Rui-Ying,Yang Xiao-Zhong,Wu Pei-Heng,Zhang Yong,Xia Jin-Song
DOI: https://doi.org/10.1088/1674-1056/24/6/068501
2015-01-01
Abstract:Niobium nitride superconducting nanowire single-photon detectors were fabricated on thermally oxidized silicon substrates with large active areas of 30 μm× 30 μm.To achieve non-constricted detectors,we improved the film growth and electron beam lithography process to fabricate uniform 100-nm wide Nb N nanowires with a fill factor of 50%.The devices showed 72.4% system detection efficiency(SDE) at 100-Hz dark count rate(DCR) and 74-ps timing jitter,measured at the fiber communication wavelength of 1550 nm.The highest SDE which is 81.2% when the DCR is ~ 700 c/s appears at the wavelength of 1650 nm.
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