Fabrication of Superconducting Nanowire Single-Photon Detector

Zhang La-Bao,Kang Lin,Chen Jian,Zhao Qing-Yuan,Jia Tao,Xu Wei-Wei,Cao Chun-Hai,Jin Biao-Bing,Wu Pei-Heng
DOI: https://doi.org/10.7498/aps.60.038501
IF: 0.906
2011-01-01
Acta Physica Sinica
Abstract:In this paper, the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides, the device failure analysis is also introduced. With those methods, we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4. 2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s, the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods.
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