Development of superconductor nanowire single photon detector

Labao Zhang,Lin Kang,Jian Chen,Peiheng Wu
DOI: https://doi.org/10.13232/j.cnki.jnju.2014.03.002
2014-01-01
Abstract:Superconductor nanowire single-photon detector (SNSPD)is a new single-photon detector with low dark count rate.This article analyzed the working mechanism and theoretical models of SNSPD.We outlined the fabrication process with 4 inches wafer compatible with standard silicon process,such as device design,materials deposition,fabrication process and packaging technology.High performance SNSPD was fabricated with system efficiency up to 75% in 1550 nm band and dark count less than 100 cps.We also carried out the research of resolving photon number and the application of SNSPD to the optical domain reflectmeter(OTDR).
What problem does this paper attempt to address?