NbTiN thin films for superconducting photon detectors on photonic and two-dimensional materials

Stephan Steinhauer,Lily Yang,Samuel Gyger,Thomas Lettner,Carlos Errando-Herranz,Klaus D. Jöns,Mohammad Amin Baghban,Katia Gallo,Julien Zichi,Val Zwiller
DOI: https://doi.org/10.1063/1.5143986
IF: 4
2020-04-27
Applied Physics Letters
Abstract:Integration of superconducting devices on photonic platforms opens up a wide range of functionalities and applications. We report on NbTiN thin films deposited on SiO<sub>2</sub>, Si<sub>3</sub>N<sub>4</sub>, GaAs, LiNbO<sub>3</sub>, and AlN as well as on a monolayer of hexagonal boron nitride, using a universal reactive co-sputtering recipe. The morphology and the superconducting properties of the NbTiN thin films with a thickness of 10 nm were characterized by atomic force microscopy and electrical transport measurements. Superconducting strip photon detectors were fabricated using a design suitable for waveguide integration and compared in terms of their internal quantum efficiency and detection pulse kinetics. Our results show well-comparable performances for detectors integrated on different platforms, while also demonstrating that reactive co-sputter deposition of NbTiN at room temperature provides a robust method for realizing superconducting devices on various materials.
physics, applied
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