Thickness-tunable growth of ultra-large, continuous and high-dielectric h-BN thin films

Dujiao Zhang,Feihong Wu,Qi Ying,Xinyu Gao,Nan Li,Kejing Wang,Zongyou Yin,Yonghong Cheng,Guodong Meng
DOI: https://doi.org/10.1039/c8tc05345f
IF: 6.4
2019-01-01
Journal of Materials Chemistry C
Abstract:The outstanding thermal properties, mechanical properties and large optical bandgap of hexagonal boron nitride (h-BN) make it very attractive for various applications in ultrathin 2D microelectronics. However, the synthesis of large lateral size and uniform h-BN thin films with a high breakdown strength still remains a great challenge. Here, we comprehensively investigated the effect of growth conditions on the thickness of h-BN films via low pressure chemical vapor deposition (LPCVD). By optimizing the LPCVD growth parameters with electropolished Cu foils as the deposition substrates and developing customized `` enclosure" quartz-boat reactors, we achieved thickness-tunable (1.50-10.30 nm) growth of h-BN thin films with a smooth surface (RMS roughness is 0.26 nm) and an ultra-large area (1.0 cm x 1.0 cm), meanwhile, the as-grown h-BN films exhibited an ultra-high breakdown strength of similar to 10.0 MV cm(-1), which is highly promising for the development of electrically reliable 2D microelectronic devices with an ultrathin feature.
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