Ultraflat Single-Crystal Hexagonal Boron Nitride for Wafer-Scale Integration of a 2D-Compatible High-Κ Metal Gate

Yani Wang,Chao Zhao,Xin Gao,Liming Zheng,Jun Qian,Xiaoyin Gao,Jiade Li,Junchuan Tang,Congwei Tan,Jiahao Wang,Xuetao Zhu,Jiandong Guo,Zhongfan Liu,Feng Ding,Hailin Peng

DOI: https://doi.org/10.1038/s41563-024-01968-z

IF: 41.2

2024-01-01

Nature Materials

Abstract:Hexagonal boron nitride (hBN) has emerged as a promising protection layer for dielectric integration in the next-generation large-scale integrated electronics. Although numerous efforts have been devoted to growing single-crystal hBN film, wafer-scale ultraflat hBN has still not been achieved. Here, we report the epitaxial growth of 4 in. ultraflat single-crystal hBN on Cu0.8Ni0.2(111)/sapphire wafers. The strong coupling between hBN and Cu0.8Ni0.2(111) suppresses the formation of wrinkles and ensures the seamless stitching of parallelly aligned hBN domains, resulting in an ultraflat single-crystal hBN film on a wafer scale. Using the ultraflat hBN as a protective layer, we integrate the wafer-scale ultrathin high-kappa dielectrics onto two-dimensional (2D) materials with a damage-free interface. The obtained hBN/HfO2 composite dielectric exhibits an ultralow current leakage (2.36 x 10(-6) A cm(-2)) and an ultrathin equivalent oxide thickness of 0.52 nm, which meets the targets of the International Roadmap for Devices and Systems. Our findings pave the way to the synthesis of ultraflat 2D materials and integration of future 2D electronics.