Abstract:Hexagonal boron nitride (hBN)-long-known as a thermally stable ceramic-is now available as atomically smooth, single-crystalline flakes, revolutionizing its use in optoelectronics. For nanophotonics, these flakes offer strong nonlinearities, hyperbolic dispersion, and single-photon emission, providing unique properties for optical and quantum-optical applications. For nanoelectronics, their pristine surfaces, chemical stability, and wide bandgap have made them the key substrate, encapsulant, and gate dielectric for two-dimensional electronic devices. However, while exploring these advantages, researchers have been restricted to flat flakes or those patterned with basic slits and holes, severely limiting advanced architectures. If freely varying flake profiles were possible, the hBN structure would present a powerful design parameter to further manipulate the flow of photons, electrons, and excitons in next-generation devices. Here, we demonstrate freeform nanostructuring of hBN by combining thermal scanning-probe lithography and reactive-ion etching to shape flakes with surprising fidelity. We leverage sub-nanometer height control and high spatial resolution to produce previously unattainable flake structures for a broad range of optoelectronic applications. For photonics, we fabricate microelements and show the straightforward transfer and integration of such elements by placing a spherical hBN microlens between two planar mirrors to obtain a stable, high-quality optical microcavity. We then decrease the patterning length scale to introduce Fourier surfaces for electrons, creating sophisticated, high-resolution landscapes in hBN, offering new possibilities for strain and band-structure engineering. These capabilities can advance the discovery and exploitation of emerging phenomena in hyperbolic metamaterials, polaritonics, twistronics, quantum materials, and 2D optoelectronic devices.

Millimeter-Scale Exfoliation of Hbn with Tunable Flake Thickness for Scalable Encapsulation

Millimeter-scale exfoliation of hBN with tunable flake thickness

Large scale growth and characterization of atomic hexagonal boron nitride layers.

Freeform nanostructuring of hexagonal boron nitride

A peeling approach for integrated manufacturing of large mono-layer h-BN crystals

Thickness-Controlled Synthesis of Uniform Hexagonal Boron Nitride Films on Metal Alloys by Chemical Vapor Deposition

Hydrothermal Exfoliation for Two-Dimension Boron Nitride Nanosheets

From the synthesis of hBN crystals to their use as nanosheets for optoelectronic devices

Liquid-Phase Exfoliation of Hexagonal Boron Nitride into Boron Nitride Nanosheets in Common Organic Solvents with Hyperbranched Polyethylene as Stabilizer

Thickness-Dependent Cross-Plane Thermal Conductivity Measurements of Exfoliated Hexagonal Boron Nitride

From the synthesis of hBN crystals to their use as nanosheets in van der Waals heterostructures

Long Phonon Mean Free Paths Observed in Cross-plane Thermal-Conductivity Measurements of Exfoliated Hexagonal Boron Nitride

Supercritical Fluid Processing of Boron Nitride Nanosheets for Polymeric Nanocomposites of Superior Thermal Transport Properties

Light emission properties of mechanical exfoliation induced extended defects in hexagonal boron nitride flakes

Sustainable Mass Production of Ultrahigh-Aspect-Ratio Hexagonal Boron Nitride Nanosheets for High-Performance Composites

Mechanical manipulation and exfoliation of boron nitride flakes by micro-plowing with an AFM tip

Atomically Thin Hexagonal Boron Nitride and Its Heterostructures

Growth Dynamics of Millimeter‐Sized Single‐Crystal Hexagonal Boron Nitride Monolayers on Secondary Recrystallized Ni (100) Substrates

Atomically-Precise Texturing of Hexagonal Boron Nitride Nanostripes

High-yield preparation of edge-functionalized and water dispersible few-layers of hexagonal boron nitride (hBN) by direct wet chemical exfoliation

Glucose-Assisted Exfoliation of Hexagonal Boron Nitride Nanosheets and Modification with Hyperbranched Polymers for Thermally Conductive Epoxy Composites: Implications for Thermal Management