Abstract:Hexagonal boron nitride (hBN)-long-known as a thermally stable ceramic-is now available as atomically smooth, single-crystalline flakes, revolutionizing its use in optoelectronics. For nanophotonics, these flakes offer strong nonlinearities, hyperbolic dispersion, and single-photon emission, providing unique properties for optical and quantum-optical applications. For nanoelectronics, their pristine surfaces, chemical stability, and wide bandgap have made them the key substrate, encapsulant, and gate dielectric for two-dimensional electronic devices. However, while exploring these advantages, researchers have been restricted to flat flakes or those patterned with basic slits and holes, severely limiting advanced architectures. If freely varying flake profiles were possible, the hBN structure would present a powerful design parameter to further manipulate the flow of photons, electrons, and excitons in next-generation devices. Here, we demonstrate freeform nanostructuring of hBN by combining thermal scanning-probe lithography and reactive-ion etching to shape flakes with surprising fidelity. We leverage sub-nanometer height control and high spatial resolution to produce previously unattainable flake structures for a broad range of optoelectronic applications. For photonics, we fabricate microelements and show the straightforward transfer and integration of such elements by placing a spherical hBN microlens between two planar mirrors to obtain a stable, high-quality optical microcavity. We then decrease the patterning length scale to introduce Fourier surfaces for electrons, creating sophisticated, high-resolution landscapes in hBN, offering new possibilities for strain and band-structure engineering. These capabilities can advance the discovery and exploitation of emerging phenomena in hyperbolic metamaterials, polaritonics, twistronics, quantum materials, and 2D optoelectronic devices.

Atomically-Precise Texturing of Hexagonal Boron Nitride Nanostripes

Chemical Vapor Deposition Growth of Large-Scale Hexagonal Boron Nitride with Controllable Orientation

Large scale growth and characterization of atomic hexagonal boron nitride layers.

Atomic-Precision Fabrication of Quasi-Full-Space Grain Boundaries in Two-Dimensional Hexagonal Boron Nitride.

Freeform nanostructuring of hexagonal boron nitride

Application-Driven Synthesis and Characterization of Hexagonal Boron Nitride on Metal and Carbon Nanotube Substrates

Millimeter-scale exfoliation of hBN with tunable flake thickness

Atomically Thin Hexagonal Boron Nitride and Its Heterostructures

From the synthesis of hBN crystals to their use as nanosheets in van der Waals heterostructures

Millimeter-Scale Exfoliation of Hbn with Tunable Flake Thickness for Scalable Encapsulation

Controlling the Orientations of H-Bn During Growth on Transition Metals by Chemical Vapor Deposition

Thickness-Controlled Synthesis of Uniform Hexagonal Boron Nitride Films on Metal Alloys by Chemical Vapor Deposition

Fabrication of Atomically Precise Nanopores in Hexagonal Boron Nitride

High-Quality Hexagonal Boron Nitride from 2D Distillation

A peeling approach for integrated manufacturing of large mono-layer h-BN crystals

From the synthesis of hBN crystals to their use as nanosheets for optoelectronic devices

Ni Foam Assisted Synthesis of High Quality Hexagonal Boron Nitride with Large Domain Size and Controllable Thickness

Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles

Growth Dynamics of Millimeter‐Sized Single‐Crystal Hexagonal Boron Nitride Monolayers on Secondary Recrystallized Ni (100) Substrates

Single-crystal hBN Monolayers from Aligned Hexagonal Islands

Synthesis of atomically thin hexagonal boron nitride films on nickel foils by molecular beam epitaxy