Effect of Different Material Systems on Interconnection Properties of 30μm Pitch Micro Bumps

Fengwei Dai,David Wei Zhang,Wenqi Zhang,Guojun Wang,Dengfeng Yang,Lin Chen,Liqiang Cao
DOI: https://doi.org/10.1109/icept.2018.8480482
2018-01-01
Abstract:As the copper pillar bumps with fine pitch and high density were widely applied in high density interconnections packaging. It's increasingly important to study the interconnection technology of high density micro bumps interconnection. In the paper, we designed Test Vehicle of copper pillar bumps with different material systems for verifying the bonding effect between copper pillar bumps. We compared the bonding experiments of micro bumps structures of three different materials. Finally, the resistance value of a single micro bump bonding structure can be obtained by testing the kelvin structure. Moreover, the test results can be verified by theoretical calculation.
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