Development of 10kω Quantum Hall Array Resistor

Zhong Qing,Wang Xueshen,Li Jinjin,Lu Yunfeng,Li Zhengkun,Fu Kai
DOI: https://doi.org/10.1109/cpem.2016.7540775
2016-01-01
Abstract:We reported the fabrication and characterization of the 10kΩ standard resistor which consists of 12 single quantum Hall bars on the AlGaAs/GaAs 2D electron gas wafer. The designed deviation of this resistor with the 10kΩ value is - 3.42×10 8 Ohm/Ohm. The preliminary DCC (digital current comparator) measurement shows that the value of the 10kΩ standard resistor deviates from the designed one of (-34.6 ±7.97) ×10 -8 Ω/Ω. Accurate measurements are in progress.
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