Abstract:The Langmuir probe is a common plasma diagnostic widely utilized in various fields of plasma physics, and its associated methods of data analysis remains in active development. In this work, we present an attempt using a power law parametrization model similar to Sheridan's empirical formulation is to describe the sheath expansion effect on electron current in an argon plasma. The fitting results using the power law parametrization method show observably better consistency compared to those using conventional interception method and inflection method. It is also observed that when used to fit the electron saturation current at probe bias voltages well beyond the plasma potential plus the argon ionization energy, resultant curve fitted by power law parametrization, as with that by linear fitting, deviates significantly from the curve fitted at lower bias voltages, albeit the saturation obtained fitted using the power law method remained consistent with that fitted at lower probe bias voltages. Probable causes of this deviation include anode glow or spots near the probe and the changes of the global plasma parameters via electron absorption at very high probe bias. The fact that the resultant electron saturation current remained consistent hints that these non-trival effects can also be approximated by power law parametrization.

The Diagnostics of Rf Glow Discharge Plasma by A Probe and Its Data Process

The diagnostics of RF glow sischarge plasma by a probe and its data process

DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSING

Measurement of plasma electron energy distribution functions by Langmuir probe using a modified AC modulation method

Diagnosis of MPT Plume by Using Langmuir Probe

Double Flush-Mounted Probe Diagnostics and Data Analysis Technique for Argon Glow Discharge Plasma

Langmuir Probe Diagnosis of DC Magnetron Sputtering Glow Discharge Plasma

Flush-Mounted Probe Diagnostics for Argon Glow Discharge Plasma

Electrostatic Probe Diagnosis on the Plasma in the Discharge Chamber of an Electron Cyclotron Resonance Ion Thruster

The Techniques of Single Probe and Emission Spectroscopy Diagnostics in Low Temperature Argon Plasmas

Parametrization of electron sheath expansion for Langmuir probe I-V traces

Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma

Measurement of the Electron Density of a Wind-Tunnel Plasma Using a Double Flush-Mounted Probe

Diagnostic Study on the Electron Density Distribution of Microwave Plasma Jet in Vacuum Environment

Application of Langmuir probe in high frequency plasma wind tunnel

Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures （sih4/c2h4/ar） Radio-Frequency Discharge

Fast Diagnosis of Transient Plasma by Langmuir Probe

Microwave Technology Used for Plasma Diagnostic in Complicated Situations

Research on Low Pressure Electronic Density Diagnostic Method of Single Paperback Probe Based on Langmuir Probe Theory

A Comparative Study of Single and Double Langmuir Probe Techniques for RF Plasma Characterization

Diagnosis of Arc Ion Plating Plasma by Langmuir Double Probes