Abstract:In the current work, the radial plasma density has been measured by utilizing a floating double probe in single and dual frequency capacitively coupled argon discharges operated in a cylindrical reactor, aiming at a better understanding of electromagnetic effects and exploring a method of improving the radial uniformity. The experimental results indicate that for single-frequency plasma sustained at low pressure, the plasma density radial profile exhibits a parabolic distribution at 90 MHz, whereas at 180 MHz, the profile evolves into a bimodal distribution, and both cases indicate poor uniformities. With increasing the pressure, the plasma radial uniformity becomes better for both driving frequency cases. By contrast, when discharges are excited by two frequencies (i.e., 90 + 180 MHz), the plasma radial profile is simultaneously influenced by both sources. It is found that by adjusting the low-frequency to high-frequency voltage amplitude ratio β, the radial profile of plasma density could be controlled and optimized for a wide pressure range. To gain a better plasma uniformity, it is necessary to consider the balance between the standing wave effect, which leads to a maximum plasma density at the reactor center, and the edge field effect, which is responsible for a maximum density near the radial electrode edge. This balance can be controlled either by selecting a proper gas pressure or by adjusting the ratio β.

Flush-Mounted Probe Diagnostics for Argon Glow Discharge Plasma

Double Flush-Mounted Probe Diagnostics and Data Analysis Technique for Argon Glow Discharge Plasma

In-Situ Diagnosis of Ar Plasma Generated by Unequal Potential Hollow Cathode Discharge

Measurement of the Electron Density of a Wind-Tunnel Plasma Using a Double Flush-Mounted Probe

Electric-probe Diagnostics for Plasma Configuration of Large-scale Magnetically Dispersed Arc Plasma

Absolute Continuum Intensity Diagnostics of a Novel Large Coaxial Gridded Hollow Cathode Argon Plasma

The diagnostics of RF glow sischarge plasma by a probe and its data process

Experimental Investigations of the Plasma Radial Uniformity in Single and Dual Frequency Capacitively Coupled Argon Discharges

Influence of the Probe Radius on the Double Flush-Mounted Probe Diagnostics

Plasma uniformity in a dual frequency capacitively coupled plasma reactor measured by optical emission spectroscopy

Langmuir Probe Diagnosis of DC Magnetron Sputtering Glow Discharge Plasma

Accurate Space Potential Measurements Using an Emissive Probe in High Pressure Plasma and Neutral Gas

The ac-coupling between a Langmuir probe and a plasma and its effect on the plasma density measurement in the afterglow

Comparative studies of cold/hot probe techniques for accurate plasma measurements

Experimental and Simulation Investigation of Electrical and Plasma Parameters in a Low Pressure Inductively Coupled Argon Plasma

The Techniques of Single Probe and Emission Spectroscopy Diagnostics in Low Temperature Argon Plasmas

The Diagnostics of Rf Glow Discharge Plasma by A Probe and Its Data Process

Monitoring of fluctuations in a direct current argon plasma jet at reduced pressure by double-electrostatic probe

Optical and Electrical Diagnostics of an Atmospheric Pressure Room-Temperature Plasma Plume

Experimental Investigation on High Heat Flux Plasma Parameters of HIT-PSI Device in Argon Discharges

Spectroscopic Investigation of the Argon Plasma Discharge in Quartz Capillary at Atmospheric Pressure