DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSING

LF Chi,KX Lin,RH Yao,XY Lin,CY Yu,YP Yu
DOI: https://doi.org/10.7498/aps.50.1313
IF: 0.906
2001-01-01
Acta Physica Sinica
Abstract:Langmuir probe is an important diagnostic tool for measuring plasma parameters. A tuned single probe has been used to diagnostic the electron energy distribution function in Ar radio frequency (13.56MHz) glow plasma. The second derivative of probe I-V characteristic was obtained after using numerical filter procedure to eliminate the statistical noise in measured I-V characteristic. A differential circuit has been designed and applied to measure the second derivative of I-V characteristic on line under the same discharge conditions. The results of the two methods are in agreement with each other.
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