Abstract:High quality (Q) factor microdisks are fundamental building blocks of on-chip integrated photonic circuits and biological sensors. The resonant modes in microdisks circulate near their boundaries, making their performances strongly dependent upon surface roughness. Surface-tension-induced microspheres and microtoroids are superior to other dielectric microdisks when comparing Q factors. However, most photonic materials such as silicon and negative photoresists are hard to be reflowed and thus the realizations of high-Q microdisks are strongly dependent on electron-beam lithography. Herein, we demonstrate a robust, cost-effective, and highly reproducible technique to fabricate ultrahigh-Q microdisks. By using silica microtoroids as masks, we have successfully replicated their ultrasmooth boundaries in a photoresist via anisotropic dry etching. The experimentally recorded Q factors of passive microdisks can be as large as 1.5 × 106. Similarly, ultrahigh Q microdisk lasers have also been replicated in dye-doped polymeric films. The laser linewidth is only 8 pm, which is limited by the spectrometer and is much narrower than that in previous reports. Meanwhile, high-Q deformed microdisks have also been fabricated by controlling the shape of microtoroids, making the internal ray dynamics and external directional laser emissions controllable. Interestingly, this technique also applies to other materials. Silicon microdisks with Q > 106 have been experimentally demonstrated with a similar process. We believe this research will be important for the advances of high-Q micro-resonators and their applications.

High-Q whispering gallery mode directly on a silicon substrate

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Light Confinement in A Low-Refraction-Index Microcavity Bonded on A Silicon Substrate

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Silicon Micro-Cavities And Their System Applications

Integrated Ultra-High-Q Optical Resonator

A fully integrated high-Q Whispering-Gallery Wedge Resonator

Universal coupler for bulk whispering gallery mode resonators based on silicon subwavelength grating waveguides

On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing

Perpendicular Coupler for Standing Wave Excitation and Wavelength Selection in High-Q Silicon Microresonators

High-Performance Whispering Gallery Microcavities Fabricated by Direct Laser Writing

Aluminum Nitride-on-sapphire Platform for Integrated High-Q Microresonators

An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

Optical Frequency Comb in Silicon Nitride Microresonator(invited)

High-Q photonic crystal cavities in all-semiconductor photonic-crystal heterostructures

High-Q and highly reproducible microdisks and microlasers.

Ultrahigh-Q, Largely Deformed Microcavities Coupled by a Free-Space Laser Beam

Laser reflow technology on high-Q toroidal microcavity