Effect of Deposition Time on Growth of Zrc/Sic Composite Coating Synthesized by Low Pressure Chemical Vapor Deposition

Fangwei Wang,Lei Chen,Yujin Wang,Mianyi Yao,Sue Hao,Jiahu Ouyang,Zhenkun Huang
DOI: https://doi.org/10.1016/j.ceramint.2016.10.187
IF: 5.532
2017-01-01
Ceramics International
Abstract:Present work synthesized ZrC/SiC composite coating on the silicon substrate from ZrCl4-CH4-H2-Ar system by low pressure chemical vapor deposition (LPCVD). The significant effect of deposition time on the growth of ZrC/SiC composite coating, phase composition, microstructure and surface roughness was investigated. Only SiC phase was deposited when the deposition time reached 1h. With the increase of deposition time, the atomic percentage of Si element decreased, Zr element increased significantly, at the same time, the order structure of sp2 carbon improved. A uniform and compact ZrC/SiC composite coating was prepared at 1400°C for the 4h deposition time. The growth mechanism of ZrC/SiC composite coating at different deposition time was described in detail.
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