Development of Critical Area Research Method for Integrated Circuits and Its Challenges

张国霞,马佩军,张旭,郝跃
2009-01-01
Abstract:Critical area research method is one of the most important research subjects of design for manufacturability (DFM). The mainstream critical area algorithms were summarized and analyzed. Advantages and limitations in Monte Carlo method,polygon operator method and Voronoi diagram were discussed. In addition,challenges to critical area research for deep submicron ICs using new lithography technology were analyzed and discussed in particular.
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