Abstract:In this paper, we report a novel and low-cost method to improve the sensitivity of a low-power 2D microelectromechanical systems thermal wind sensor by using HF wet etching. After wet etching, the thickness of the glass substrate decreases, so that the sensor's thermal vias become more exposed to the wind. As a result, the conductive heat transfer is weakened and the convective heat transfer is enhanced in sensor operation. Finite-element method simulations verify this analysis. Moreover, the sensor chips with different lengths of silicon vias above the substrate are successfully fabricated and tested. Measurement results show that the wet etching has no influence on the metal film sensing and heating elements of the sensor. Besides, before and after wet etching for 7 and 14 min, at the wind speed of 5 m/s, the measured sensitivities of the sensor with a total power consumption of 24.5 mWare 77.2, 98.6, and 164.1 mK/(m/s). Measurement results also show that the improved sensitivity of the sensor chip can provide a more accurate measurement in wind speed but has little effect on the wind direction measurement. Instead, the accuracy of wind direction measurement is mainly related to the structural and thermal symmetries of the wind sensor. After compensation, the proposed thermal wind sensor can detect the wind direction in a full range of 360 degrees with an mean error of 2.3 degrees and a maximum error of 6 degrees.

Design and Test of 2-D MEMS Wind Speed and Direction Sensor

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Experimental Study of a Dual-Mode Control MEMS Wind Sensor with High Accuracy

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COMPACT MEMS THERMAL WIND SENSOR USING DUAL POLYSILICON LAYERS WITH IMPROVED ACCURACY

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Sensitivity Improvement of a 2D MEMS Thermal Wind Sensor for Low-Power Applications

Experiment Of The Mems Wind Sensor Based On Temperature-Balanced Mode

Flip-Chip on Board Packaging of A Thermal Wind Sensor

Analytic Model of Dual-Layer-Structure MEMS Thermal Wind Sensor with Increased Sensitivity

Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications

Modelling and Characterization of a Robust, Low-Power and Wide-Range Thermal Wind Sensor

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The Fabrication and Integration of a Novel Shear Stress Sensor Array and Its Wind Tunnel Test