Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications

Yizhou Ye,Zhenxiang Yi,Shixuan Gao,Ming Qin,Qing-An Huang
DOI: https://doi.org/10.1109/jmems.2018.2849086
IF: 2.829
2018-01-01
Journal of Microelectromechanical Systems
Abstract:This paper introduces a novel sensing element scheme to improve the accuracy of 2-D micromachined thermal wind sensor. The sensing element consists of eight heaters and eight thermistors placed on ceramic substrate. The octagon-arranged sixteen resistors are divided into two wind sensing groups, cross-type group and saltire-type group. These two groups monitor wind independently, and the final measured wind speed and direction are extracted from the measurement results of the two groups. Based on this octagon-sensing design, the sensor achieves higher accuracy for wind measurement, which is verified by the experiment. The results show that for the wind speed up to 33 m/s, the sensor has a measurement error less than ±1%, and the airflow direction over the full range of 360° is determined with a maximum error of ±1.5°. [2018-0045]
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