Microchip Controlled Electronic Circuit for Measurement of the Angular Acceleration

MA Yan,TIAN Zuo-hua

DOI: https://doi.org/10.3969/j.issn.1671-4598.2001.02.008

2001-01-01

Abstract:A microprocessor-controlled system used for directly measuring the angular acceleration is submitted in this paper. The structure of the hardware, key procedure and measurement error are introduced in detail.

What problem does this paper attempt to address?

Digital Capacitance Measurement System Based on FPGA

ZHOU Xiao-qi,ZHENG Yang-ming,JIN Zhong-he,WANG Yue-lin

DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.04.042

2008-01-01

Abstract:Many of the MEMS accelerators measure acceleration by measuring the change of difference capacitance.The circuit used in precision capacitance measurement has been designed recent years.This digital capacitance measurement system based on FPGA has high precision and stability,low sensitivity of parasitic capacitance and resistance and it can use digital output interface.The capacitance measurement range of the system is ±2 pF,the capacitance measurement resolution is 0.115 fF.Connected to a acceleration sensor of which sensitivity is 1.056 pF/g,the system's acceleration measurement resolution is 0.107 mg,and the dynamic range is 4.0×104.
The Microinstrumentation For Acceleration

Wd Zhang,Jj Xiong,Zy Zhou,Xy Ye,Xh Wang

1997-01-01

Abstract:This article presents a microinstrumentation for acceleration (MIA) that consists of silicon micromachined accelerometer, TH9601 - ASIC of self-adaptive sampling and encoding, as well as data storage and readout controlling, ADC, RAM, and so on. The MIA has been used to measure acceleration information of a missile flying, a person walking and an automobile being collided and so on. The mainly performance parameters are followed:Measurement Scale: +/-20g, +/-200g, +/-500g.ADC: 8 bits, error less than or equal to +/-1 LSB.Real-time self-adaptive sample freq.f = f(0) similar to f(0)/n,here: f(0) less than or equal to 1 MHz,n=1,2,.. ..,27.Memory capacity : 512 k bytes.Undergoing 10000g shock.Volume of the MIA : 2.4 cm(3).The composition, operation principle, structure and applications of the MIA are detailed in the paper.
Micro-Accelerometer Utilizing Digital Control and PWM Electrostatic Servo Technique

An Kang

Abstract:Micro-accelerometer utilizing digital control and PWM electrostatic servo technique based on TMS320F2810 is introduced. The basic detection principle is presented and the principle of operation is analyzed.The math-model of close-loop system is established and calibration module in s region is designed.The method of designing digital calibration module is introduced and its influence on system's dynamic performance is researched. Close-loop digital control and PWM output of micro-accelerometer are realized.

Engineering
A micromachined angular-acceleration sensor for geophysical applications

Huafeng Liu,W. T. Pike

DOI: https://doi.org/10.1063/1.4966547

IF: 4

2016-10-24

Applied Physics Letters

Abstract:This paper presents an angular-acceleration sensor that works as either an angular accelerometer or a gravity gradiometer and is based on the micro electromechanical system (MEMS) technology. The changes in the angle of the sensor mass are sensed by a rotational capacitive array transducer that is formed by electrodes on both the stator and rotor dies of the flip-chip-bonded MEMS chip (21 mm × 12.5 mm × 1 mm). The prototype was characterized, demonstrating a fundamental frequency of 27 Hz, a quality factor of 230 in air, and a sensitivity of 6 mV/(rad/s2). The demonstrated noise floor was less than 0.003 rad/s2/Hz within a bandwidth of 0.1 Hz to 10 Hz, which is comparable with the conventional angular accelerometer and is better than the other reported MEMS sensors in low-frequency ranges. The features of small size and low cost suggest that this MEMS angular-acceleration sensor could be mounted on a drone, a satellite or even a Mars rover, and it is promising to be used for monitoring angular accelerations, aiding seismic recording, mapping gravity anomalies, and other geophysical applications for large-scale terrestrial and space deployments.

physics, applied
An Electrochemical Angular Micro-Accelerometer Based on Miniaturized Planar Electrodes Positioned in Parallel

Bowen Liu,Junbo Wang,Deyong Chen,Tian Liang,Chao Xu,Wenjie Qi,Xu She,Vadim M. Agafonov,Anna S. Shabalina,Jian Chen

DOI: https://doi.org/10.1109/jsen.2021.3102240

IF: 4.3

2021-10-01

IEEE Sensors Journal

Abstract:Electrochemical angular micro-accelerometers based on miniaturized planar electrodes positioned in parallel were reported in this paper. Based on liquid inertial masses, incoming angular acceleration was translated into varied concentrations of reactive ions around sensitive electrodes, generating detection currents. As to the sensitive unit configuration, two electrode setups of A(anode) C(cathode)CA-ACCA and ACAC-CACA were utilized in this study for comparison where corresponding key geometrical parameters were optimized based on numerical simulations. Based on microfabrication, electrochemical angular micro-accelerometers with geometrical variations were fabricated and characterized, producing consistent results with numerical simulations and therefore optimized geometrical parameters of electrode space, electrode width and electrode gap were determined. Furthermore, for each electrode setup with optimized geometries, six electrochemical angular micro-accelerometers were characterized, producing high sensitivities with low coefficients of variation, which were 20.169 ± 0.843 V/(rad/s2) for ACCA-ACCA and 5.868 ± 0.328 V/(rad/s2) for ACAC-CACA at 0.01 Hz. In summary, the electrochemical angular micro-accelerometers reported in this study can provide new perspectives for the monitoring of angular vibrations in seismology.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
A Way of Automatic Measuring Micro-Accelerometer Using Monolithic Computer

Yu-xiang FENG,Jing-xin DONG,Chang-de ZHAO,Tian-zhun WU

DOI: https://doi.org/10.3969/j.issn.1671-4776.2005.07.008

2005-01-01

Abstract:An automatic measuring system based on the monolithic computer of ATMEL Corporation was introduced,according to the criterion of the measuring of micro-accelerometer.The A/D grounds separation,the time-lapse of P/N voltage,the temperature collection and the serial port protocol were analyzed.The results show that this is a low-cost and credible solution for micro-accelerometer auto-measurement.
A Novel Angular Acceleration Sensor Based on the Electromagnetic Induction Principle and Investigation of Its Calibration Tests

Hao Zhao,Hao Feng

DOI: https://doi.org/10.3390/s130810370

IF: 3.9

2013-08-12

Sensors

Abstract:An angular acceleration sensor can be used for the dynamic analysis of human and joint motions. In this paper, an angular acceleration sensor with novel structure based on the principle of electromagnetic induction is designed. The method involves the construction of a constant magnetic field by the excitation windings of sensor, and the cup-shaped rotor that cut the magnetic field. The output windings of the sensor generate an electromotive force, which is directly proportional to the angular acceleration through the electromagnetic coupling when the rotor has rotational angular acceleration. The mechanical structure and the magnetic working circuit of the sensor are described. The output properties and the mathematical model including the transfer function and state-space model of the sensor are established. The asymptotical stability of the sensor when it is working is verified by the Lyapunov Theorem. An angular acceleration calibration device based on the torsional pendulum principle is designed. The method involves the coaxial connection of the angular acceleration sensor, torsion pendulum and a high-precision angle sensor, and then an initial external force is applied to the torsion pendulum to produce a periodic damping angle oscillation. The angular acceleration sensor and the angle sensor will generate two corresponding electrical signals. The sensitivity coefficient of the angular acceleration sensor can be obtained after processing these two-channel signals. The experiment results show that the sensitivity coefficient of the sensor is about 17.29 mv/Krad·s2. Finally, the errors existing in the practical applications of the sensor are discussed and the corresponding improvement measures are proposed to provide effective technical support for the practical promotion of the novel sensor.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
A Novel Permanent Magnetic Angular Acceleration Sensor

Hao Zhao,Hao Feng

DOI: https://doi.org/10.3390/s150716136

2015-07-03

Abstract:Angular acceleration is an important parameter for status monitoring and fault diagnosis of rotary machinery. Therefore, we developed a novel permanent magnetic angular acceleration sensor, which is without rotation angle limitations and could directly measure the instantaneous angular acceleration of the rotating system. The sensor rotor only needs to be coaxially connected with the rotating system, which enables convenient sensor installation. For the cup structure of the sensor rotor, it has a relatively small rotational inertia. Due to the unique mechanical structure of the sensor, the output signal of the sensor can be directed without a slip ring, which avoids signal weakening effect. In this paper, the operating principle of the sensor is described, and simulated using finite element method. The sensitivity of the sensor is calibrated by torsional pendulum and angle sensor, yielding an experimental result of about 0.88 mV/(rad·s(-2)). Finally, the angular acceleration of the actual rotating system has been tested, using both a single-phase asynchronous motor and a step motor. Experimental result confirms the operating principle of the sensor and indicates that the sensor has good practicability.
A microchip optomechanical accelerometer

Alexander G. Krause,Martin Winger,Tim D. Blasius,Qiang Lin,Oskar Painter

DOI: https://doi.org/10.48550/arXiv.1203.5730

2012-03-26

Optics

Abstract:The monitoring of accelerations is essential for a variety of applications ranging from inertial navigation to consumer electronics. The basic operation principle of an accelerometer is to measure the displacement of a flexibly mounted test mass; sensitive displacement measurement can be realized using capacitive, piezo-electric, tunnel-current, or optical methods. While optical readout provides superior displacement resolution and resilience to electromagnetic interference, current optical accelerometers either do not allow for chip-scale integration or require bulky test masses. Here we demonstrate an optomechanical accelerometer that employs ultra-sensitive all-optical displacement read-out using a planar photonic crystal cavity monolithically integrated with a nano-tethered test mass of high mechanical Q-factor. This device architecture allows for full on-chip integration and achieves a broadband acceleration resolution of 10 \mu g/rt-Hz, a bandwidth greater than 20 kHz, and a dynamic range of 50 dB with sub-milliwatt optical power requirements. Moreover, the nano-gram test masses used here allow for optomechanical back-action in the form of cooling or the optical spring effect, setting the stage for a new class of motional sensors.
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels

Bowen Liu,Tian Liang,Wenjie Qi,Anxiang Zhong,Mingwei Chen,Yulan Lu,Jian Chen,Deyong Chen,Junbo Wang

DOI: https://doi.org/10.1038/s41378-022-00411-0

2022-07-12

Abstract:A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels was developed in this paper. Based on a liquid inertial mass, an incoming angular acceleration was translated into varied concentrations of reactive ions around sensitive microelectrodes, generating a detection current. Key structural parameters of the sensitive microelectrodes were designed and compared based on theoretical analysis and numerical simulations. An angular microaccelerometer incorporating sensitive microelectrodes was then fabricated, assembled and characterized, producing a sensitivity of 338 V/(rad/s2), a -3 dB bandwidth of 0.01-10 Hz and a noise level of 4.67 × 10-8 (rad/s2)/Hz1/2 @ 1 Hz. These performances were better than their commercial counterparts based on traditional electrodes and previously reported microaccelerometers based on microsensitive electrodes in parallel with flow channels, which can be applied to measure rotational accelerations in earthquakes and buildings.
Study of Drill Measuring System Based on MEMS Accelerative and Magnetoresistive Sensor

Jian Kang,BoXiong Wang,ZhongXiang Hu,Rui Wang

DOI: https://doi.org/10.1109/icemi.2009.5274627

2009-01-01

Abstract:It is very important for modern directional drilling systems to measure the attitude of drilling accurately. A Micro Electro-Mechanical System (MEMS) composed of a three-axis micro accelerometer and a three-axis micro magnetoresistive is designed. A carrier communication is used to transmit data acquired by sensors instead of the mode of traditional transmission. The theory and the algorithm of the coordinate transform are applied in the study of the attitudes, such as the azimuth, the inclination and the angle to tool face. Compared to conventional systems, the system minimizes labor costs, improves precision, and enhances the degree of automation. Experimental results verify that such a measuring system becomes more stable and reliable. And full scale can be performed attitude detection with a plusmn0.3 accuracy for angle to tool face, a plusmn0.1degaccuracy for inclination and a plusmn0. 2degaccuracy for azimuth.
Design and Implementation of a System-on-Chip for Self-Calibration of an Angular Position Sensor

Zhenyi Gao,Bin Zhou,Chao Li,Bo Hou,Haobo Sun,Qi Wei,Rong Zhang

DOI: https://doi.org/10.3390/app9224772

2019-11-08

Applied Sciences

Abstract:In this study, a novel signal processing algorithm and hardware processing circuit for the self-calibration of angular position sensors is proposed. To calibrate error components commonly found in angular position sensors, a parameter identification algorithm based on the least mean square error demodulation is developed. A processor to run programs and a coprocessor based on the above algorithm are used and designed to form a System-on-Chip, which can calibrate signals as well as implement parameter configuration and control algorithm applications. In order to verify the theoretical validity of the design, analysis and simulation verification of the scheme are carried out, and the maximum absolute error value in the algorithm simulation is reduced to 0.003 %. The circuit’s Register-Transfer Level simulation shows that the maximum absolute value of the angular error is reduced to 0.03%. Simulation results verify the calibration performance with and without quantization and rounding error, respectively. The entire system is prototyped on a Field Programmable Gate Array and tested on a Capacitive Angular Position Sensor. The proposed scheme can reduce the absolute value of angular error to 4.36%, compared to 7.68% from the experimental results of a different calibration scheme.
Technology Study of Aircraft's Attitude Identify Based-on MEMS Accelerometer

WANG Zhan-ping,Tang Xiao-hong,WANG Ya-fei,GAO Chun-ming,ZHOU Ying,YANG Li-feng

DOI: https://doi.org/10.3969/j.issn.1004-2474.2007.02.034

2007-01-01

Abstract:This paper studies a method of identification about the aircraft's attitude by using several low-sensitivity MEMS accelerometers of gravity.When the output analog signals came from the MEMS accelerometers,sampling them into digital signals and processed them with MCU,then system could get the value of inclination and elevation angle with high precision.It is pointed that MCU systems could measure the value of inclination angle at the range of-180°~+180° even if the aircraft were circumvolving.The results indicate that this method can be used to determine the attitude of aircraft which needs to be controlled.
A Collected Scheme of the UAV's Acceleration Based on C8051F020 Chip Microcomputer

Yanxiong Ke

2009-01-01

Aircraft Design

Abstract:This article designed a sort of facility and convenient acceleration collected system for measuring and manipulating the UAV' s three axises acceleration.This system adopted high compositive singlechip C8051F020 to collect data and transform them from analog signal to digital signal,then memorized and processed them.Using the serial Universal Asynchronous Receiver/Transmitter,they can transfer the data to the next singlechip C8051F020 and transmit them to receive equipment.On the condition of experimentation,we could use personal computer analysis or display the data.
A Hybrid Micro-Accelerometer System with CMOS Readout Circuit and Self-Test Function

WP Chen,H Chen,XW Liu,XY Tan

DOI: https://doi.org/10.1117/12.664131

2005-01-01

Abstract:A hybrid two-chip micro-accelerometer system consisting of a novel lateral capacitive silicon micro-acceleration sensor and a CMOS readout circuit is presented. The micro-acceleration sensor has a proof mass with the size of 0.6 x 2.4 x 0.1 mm(3), the mass of 380 mu g and the capacitive gap of 6 mu m, fabricated by deep reactive ion etching (DRIE) and anodic bonding, using three masks. The CMOS readout circuit with a dynamic range of 75dB, a measured capacitive sensitivity of 10.7V/pF, can offer a self-test voltage of 7V by utilizing a charge pump circuit. The hybrid-integrated system with power supply of DC5V has a measured sensitivity of 18mV/g, 1KHz frequency bandwidth and nonlinearity of 0.18% within the measured range of 50g.
Automatic measuring system of MEMS accelerometer

HU Pei-da,DONG Jing-xin,ZHAO Chang-de,LI Tong-jie

2008-01-01

Abstract:To obtain high precision and efficiency and avoid grounding wire interference,the DAQ-2213 Data Acquisition Card was used to measure the output voltage of MEMS Accelerometer.Several independent Power Sources and differential modes were used to depress the grounding wire interference.Pt100 was used to sense the temperature,and jointed to the hardware circuit by three electrical wires.PCI-(A)9114 Data Acquisition Card was chosen to measure the output voltage of converter.Then using the software developed with Labview7.0 to process the data automatically and produce Microsoft Office Word document to record the information in the form of pictures and tables.The precision of the output voltage is 40 μV,and the temperature is 0.277℃.Experimental results show that the system can measure the output voltage and the temperature timely and precisely.The signal interference is reduced by using independent power source and differential input mode.
Micro-torque Measurement and Analysis System

Pan Jian,Hong Yi,Shi Guanglin

DOI: https://doi.org/10.16526/j.cnki.11-4762/tp.2009.05.040

2009-01-01

Abstract:A method that based on Matlab DAQ toolbox and GUI module to quickly construct a data acquisition and analyze system is proposed for a micro-torque measurement equipment designed for decorative parts used on automobiles. The Advantech PCI1711 DAQ card is used to acquire data and control the motor. The GUI module of Matlab is utilized to build user's control interface. Firstly, the components and the principle of the equipment is analyzed. Then the flow chart of the software is shown. The analog input & output, the digital input & output functions of Matlab DAQ toolbox is detail described. At last, a micro-torque measurement system based on Matlab DAQ toolbox and GUI module is fulfilled. Measurement results show that method is effective.
A High Resolution Tilt Measurement System Based on Multi-Accelerometers

Yinsheng Weng,Shudong Wang,Hongcai Zhang,Hairong Gu,Xueyong Wei

DOI: https://doi.org/10.1016/j.measurement.2017.05.058

IF: 5.6

2017-01-01

Measurement

Abstract:In this paper, a wireless tilt measurement system of high resolution is proposed and demonstrated using multiple MEMS (Micro-electromechanical Systems) accelerometers. The measurement system is mainly composed of MEMS accelerometers as sensing unit, a MCU (Micro Controller Unit), wireless transceivers, battery and a PC terminal. Three MEMS accelerometers are purposely located with specific orientations and the system output is determined from the accelerometer that is most sensitive in the tilting range of the object under testing. The raw measured signal collected by the MCU is processed using Kalman Filter (KF) and the analyzed data is transmitted to the PC terminal by a wireless module. The effect of different Imo' parameters are analyzed using the Allan variance. After eliminating the accelerometers' installation errors, the measuring resolution of system is found to be 0.02 in the whole range from 0 to 360. In the step test of tilting back and forth, it is found that the absolute measurement error is less than 0.004 for the step change of 0.05. (C) 2017 Elsevier Ltd. All rights reserved.
A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure

Mingwei Chen,Anxiang Zhong,Yulan Lu,Jian Chen,Deyong Chen,Junbo Wang

DOI: https://doi.org/10.3390/mi13020186

IF: 3.4

2022-01-26

Micromachines

Abstract:This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the electrode area and the sensitivity of the device. Finite element simulation was conducted for geometry optimization where the anode length, the orifice diameter, and the orifice spacing of the sensitive unit were determined as 200 μm, 80 μm, and 500 μm, respectively. Microfabrication was conducted to manufacture the silicon-based three-electrode structure, which then was assembled to form the electrochemical angular micro-accelerometer, leveraging mechanical compression. Device characterization was conducted, where the sensitivity, bandwidth, and noise level were quantified as 290.193 V/(rad/s2) at 1 Hz, 0.01–2 Hz, and 1.78 × 10−8 (rad/s2)/Hz1/2 at 1 Hz, respectively. Due to the inclusion of the silicon-based three-electrode structure, compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this article was featured with a higher sensitivity and a lower self-noise level. Therefore, it could be used for the measurement of low-frequency seismic rotation signals and played a role in the seismic design of building structures.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

Microchip Controlled Electronic Circuit for Measurement of the Angular Acceleration

Digital Capacitance Measurement System Based on FPGA

The Microinstrumentation For Acceleration

Micro-Accelerometer Utilizing Digital Control and PWM Electrostatic Servo Technique

A micromachined angular-acceleration sensor for geophysical applications

An Electrochemical Angular Micro-Accelerometer Based on Miniaturized Planar Electrodes Positioned in Parallel

A Way of Automatic Measuring Micro-Accelerometer Using Monolithic Computer

A Novel Angular Acceleration Sensor Based on the Electromagnetic Induction Principle and Investigation of Its Calibration Tests

A Novel Permanent Magnetic Angular Acceleration Sensor

A microchip optomechanical accelerometer

A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels

Study of Drill Measuring System Based on MEMS Accelerative and Magnetoresistive Sensor

Design and Implementation of a System-on-Chip for Self-Calibration of an Angular Position Sensor

Technology Study of Aircraft's Attitude Identify Based-on MEMS Accelerometer

A Collected Scheme of the UAV's Acceleration Based on C8051F020 Chip Microcomputer

A Hybrid Micro-Accelerometer System with CMOS Readout Circuit and Self-Test Function

Automatic measuring system of MEMS accelerometer

Micro-torque Measurement and Analysis System

A High Resolution Tilt Measurement System Based on Multi-Accelerometers

A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure