Dynamic Characteristics Analysis of Contact Scanning Probe

贾立德,王家伍,李婷,李圣怡
DOI: https://doi.org/10.3969/j.issn.1003-5451.2010.01.002
2010-01-01
Abstract:Based on introduction of the swing-arm profilometry,the structural model of the high-accuracy contact scanning probe was built by using the swing-arm profilometer.The effecting rules of the scanning velocity on the measurement accuracy wereanalyzed.A sphere with aperture=500mm,relative aperture=1:1,was tested with the contact scanning probe,and the testing result was compared with that of the interferometer.The experiments validated that the analysis is correct.
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