Characterization of Fiber-Like SiCN Formed During the Nitridation of Silicon

Ling Qu,Wen Jie Yuan,Cong Zhang,Jun Li
DOI: https://doi.org/10.4028/www.scientific.net/ssp.281.330
2018-01-01
Solid State Phenomena
Abstract:Fiber-like SiCN was found in the product from the nitridation of silicon by foaming and reaction sintering. The mixture slurry was comprised of silicon powder and cornstarch as raw material, yttrium oxide as sintering additive and some foams. The casted sample was sintered at 1650oC in nitrogen. The phase composition of the as-prepared sample was determined by X-ray powder diffractometer, and the microstructure of the sample was observed by scanning electron microscope and transmission electron microscope equipped with energy dispersive spectrometer. The results show that fiber-like SiCN with micron scale grown along [100] direction, and the interplanar spacing was 0.655 nm.
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