Abstract:Silicon nitride ceramics of high thermal conductivity is a promising candidate for application as ceramic IC substrates. The thermal conductivity of Si3N4 can be changed greatly by the use of different sintering additives. In this work, different systems of additives were used to sinter the silicon nitride ceramics, including Y2O3-MgO, Y2O3-CaO, CeO2-MgO, CeO2-CaO, La2O3-MgO and La2O3-CaO, and their effects on the thermal conductivity and the mechanical and electrical properties of the sintered Si3N4 ceramics were studied. The ceramics were sintered by the spark plasma sintering (SPS) method at 1500 degrees C for 5 min which was then heat treated at 1900 degrees C for 3 h under N-2 atmosphere. Results showed that the conductivities of the ceramics sintered from the rare-earth additives tended to decrease with the increase of the cation radius in the rare-earth oxides. Different from the use of MgO, the additives of CaO did not generate the desired rod-like grains of silicon nitride which thus led to a lower thermal conductivity and a lower strength of the ceramics, although it gave a higher ceramic hardness. In contrast, the Y2O3-MgO additive system, under the optimized sintering conditions, provided a higher thermal conductivity of 80 W//m.K, with the bend strength larger than 1000 MPa. Meanwhile, the bulk resistivity was higher than 10(13)Omega.m, the dielectric constant was lower than 10 and the dielectric dissipation fraction below 3x10(-3).

Comparative Study of Fluoride and Non-Fluoride Additives in High Thermal Conductive Silicon Nitride Ceramics Fabricated by Spark Plasma Sintering and Post-Sintering Heat Treatment

Optimization of Microstructure to Improve Si3n4 Ceramics with Thermal Conductivity and Mechanical Properties: Effect of Si and Α-Si3n4 Powder Composition

Silicon Nitride Ceramics with High Thermal Conductivity and Excellent Mechanical Properties Fabricated with MgF2 Sintering Aid and Post Sintering Heat Treatment

Fluoride doped SiC/Si3N4 composite as a high thermal conductive material with enhanced mechanical properties

Effect of Composite Sintering Additives Containing Non-Oxide on Mechanical, Thermal and Dielectric Properties of Silicon Nitride Ceramics Substrate

Sintering Behavior, Microstructure and Mechanical Properties of Various Fluorine-Containing Y-SiAlON Glass-Ceramics

Fabrication of high thermal conductivity silicon nitride ceramics by pressureless sintering with MgO and Y2O3 as sintering additives

Study on Thermal Conductivity of Spark-Plasma-Sintered Silicon Nitride Ceramics

The influence of magnesium compounds on the properties of silicon nitride ceramics

Effect of CeO2, Dy2O3, Yb 2O3 and y2O3 additives on thermal conductivity of silicon nitride ceramics

Effects of MgSiN2 Addition and Post-Annealing on Mechanical and Thermal Properties of Si3N4 Ceramics

Effect Of Rare-Earth Additives On Thermal Conductivity, Mechanical And Electrical Properties Of Silicon Nitride Ceramics

Study of the Thermal Conductivity of Si3N4 Sintered with CeO2 and MgO Additives

Study on the thermal conductivity of silicon nitride ceramics with magnesia and yttria as sintering additives

Study on Thermal Conductivity of Si3N4 Sintered with Y2O3-MgO Additive System

Study on the thermal conductivity of Si3N4 sintered with Y2O3-MgO additive system

Sintering and Properties of Si3N4 with LaF3/MgO Additives

Fabrication of Si3N4 ceramics with improved thermal conductivity by carbothermal reduction and two‐step sintering

Effects of sintering additives on mechanical properties and microstructure of Si3N4 ceramics by microwave sintering