Abstract:Although ultrafast laser materials processing has advanced at a breakneck pace over the last two decades, most applications have been developed with laser pulses at near-IR or visible wavelengths. Recent progress in mid-infrared (MIR) femtosecond laser source development may create novel capabilities for material processing. This is because, at high intensities required for such processing, wavelength tuning to longer wavelengths opens the pathway to a special regime of laser-solid interactions. Under these conditions, due to the ${\lambda}^2$ scaling, the ponderomotive energy of laser-driven electrons may significantly exceed photon energy, band gap and electron affinity and can dominantly drive absorption, resulting in a paradigm shift in the traditional concepts of ultrafast laser-solid interactions. Irreversible high-intensity ultrafast MIR laser-solid interactions are of primary interest in this connection, but they have not been systematically studied so far. To address this fundamental gap, we performed a detailed experimental investigation of high-intensity ultrafast modifications of silicon by single femtosecond MIR pulses (${\lambda}$ = 2.7 - 4.2 ${\mu}$m). Ultrafast melting, interaction with silicon-oxide surface layer, and ablation of the oxide and crystal surfaces were ex-situ characterized by scanning electron, atomic-force, and transmission electron microscopy combined with focused ion-beam milling, electron diffractometry, and ${\mu}$-Raman spectroscopy. Laser induced damage and ablation (LIDA) thresholds were measured as functions of laser wavelength. The traditional theoretical models did not reproduce the wavelength scaling of the damage thresholds. To address the disagreement, we discuss possible novel pathways of energy deposition driven by the ponderomotive energy and field effects characteristic of the MIR wavelength regime.

Direct Observation of the Reversible and Irreversible Processes in Femtosecond Laser-Irradiated Fused Silica at the Near-Damage-threshold Fluence

Time-resolved Dynamics of 355-Nm Laser-Irradiated Surface Damage on Fused Silica

Ultrafast Process Characterization of Laser-Induced Damage in Fused Silica Using Pump-Probe Shadow Imaging Techniques

Femtosecond-Laser-Ablation Dynamics in Silicon Revealed by Transient Reflectivity Change

Single-Shot Multi-Stage Damage and Ablation of Silicon by Femtosecond Mid-infrared Laser Pulses

Dynamics of filamentary damage induced by nanosecond laser in fused silica

Interaction between sub-picosecond laser and fused silica

Explosion Plume on the Exit Surface of Fused Silica During UV Laser- Induced Damage

Damage Induced 0n Fused Silica by Fundamental Frequency and Third Harmonic of Nd:YAG Laser

Temporal-spatial Dynamics of Electronic Plasma in Femtosecond Laser Induced Damage.

Bulk Damage and Stress Behavior of Fused Silica Irradiated by Nanosecond Laser

Near-Infrared Femtosecond Laser Induced Defect Formation in High Purity Silica below the Optical Breakdown Threshold

Ultrafast heat transfer dynamics induced by femtosecond laser pulse in fused silica

Characteristics of Optical Emission During Laser-Induced Damage Events of Fused Silica

Laser-Induced Damage Growth on Larger-Aperture Fused Silica Optical Components at 351 Nm

Femtosecond Laser Pulse-Train Induced Breakdown in Fused Silica: the Role of Seed Electrons

Different Tendencies of Breakdown Threshold on Pulse Duration in the Subpicosecond Regime in Fused Silica

The Spatiotemporal Dynamics of Electron Plasma in Femtosecond Laser Double Pulses Induced Damage in Fused Silica

Experimental Study on 800 Nm Femtosecond Laser Ablation of Fused Silica in Air and Vacuum

Laser-induced defects in fused silica by UV laser irradiation

Laser Induced Damage in Fused Silica for 248 nm